发明申请
- 专利标题: Probe Card with Balanced Lateral Force
- 专利标题(中): 具有平衡侧向力的探针卡
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申请号: US11457132申请日: 2006-07-12
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公开(公告)号: US20080012594A1公开(公告)日: 2008-01-17
- 发明人: Shaoning Lu , Melvin Khoo , Nim Tea
- 申请人: Shaoning Lu , Melvin Khoo , Nim Tea
- 主分类号: G01R31/02
- IPC分类号: G01R31/02
摘要:
A novel method and structure for counter-balancing a lateral force exerted by a probe card onto a device under test (“DUT”) is disclosed. Many DUTs (particularly memory devices) are tested in parallel (i.e., many die at a time) and have unequal numbers of contact pads on top vs. bottom and/or right vs. left sides of the die. The probe card used to test the DUT would necessarily have an uneven distribution of probes that match the contact pads and, as a consequence, may exert a net lateral force on the DUT. By manipulating the individual characteristics of the individual probes, a probe card may be constructed that zeroes the lateral force. Characteristics such as the direction and stiffness of the individual probes can be varied to zero the net lateral force.
公开/授权文献
- US07538567B2 Probe card with balanced lateral force 公开/授权日:2009-05-26
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