Invention Application
- Patent Title: METAL LINE OF SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
- Patent Title (中): 金属线半导体器件及其制造方法
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Application No.: US11771214Application Date: 2007-06-29
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Publication No.: US20080014734A1Publication Date: 2008-01-17
- Inventor: Young Ok HONG , Dong Hwan LEE
- Applicant: Young Ok HONG , Dong Hwan LEE
- Applicant Address: KR Icheon-si
- Assignee: HYNIX SEMICONDUCTOR INC.
- Current Assignee: HYNIX SEMICONDUCTOR INC.
- Current Assignee Address: KR Icheon-si
- Priority: KR2006-63084 20060705; KR2006-74131 20060807
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
A metal line of a semiconductor device comprising contact plugs, a plurality of first trenches, first metal lines, a plurality of second trenches, and second metal lines. The contact plugs are formed over a semiconductor substrate and are insulated from each other by a first insulating layer. The plurality of first trenches are formed in the first insulating layer and are connected to first contact plugs of the contact plugs. The first metal lines are formed within the first trenches and are connected to the first contact plugs. The plurality of second trenches are formed over the first metal lines and the first insulating layer and comprise a second insulating layer connected to second contact plugs of the contact plugs. The second metal lines are formed within the second trenches and are connected to the second contact plugs.
Public/Granted literature
- US07741717B2 Metal line of semiconductor device and method of fabricating the same Public/Granted day:2010-06-22
Information query
IPC分类: