发明申请
- 专利标题: THERMAL TYPE FLOW RATE MEASURING APPARATUS
- 专利标题(中): 热式流量测量装置
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申请号: US11765736申请日: 2007-06-20
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公开(公告)号: US20080016958A1公开(公告)日: 2008-01-24
- 发明人: Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Keiji Hanzawa , Yasuhiro Kanamaru
- 申请人: Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Keiji Hanzawa , Yasuhiro Kanamaru
- 优先权: JP2006-171594 20060621
- 主分类号: G01F1/68
- IPC分类号: G01F1/68
摘要:
The coupling capacitance of the wiring portions of a thermal type flow rate measuring apparatus is reduced so as to prevent a drop in the response characteristics. A detection element of the thermal type flow rate measuring apparatus includes a planar substrate made of silicon, ceramic, or the like, in which a diaphragm is formed. On the surface of the diaphragm, there are disposed a heat-generating resistor as a heat-generating element that is heated to a predetermined temperature difference from the temperature of air flow to be measured, a heat-generating element temperature-detecting resistor for detecting the temperature of the heat-generating resistor, and temperature-detecting resistors disposed on both sides of the heat-generating resistor. The detection element also includes wiring portions which have connecting terminals electrically connected to the heat-generating resistor and a wiring pattern electrically connected with the surface of the planar substrate.
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