公开(公告)号：US07721599B2

公开(公告)日：2010-05-25

申请号：US11814308

申请日：2006-02-20

申请人： Masahiro Matsumoto ,  Hiroshi Nakano ,  Masamichi Yamada ,  Keiji Hanzawa ,  Izumi Watanabe ,  Keiichi Nakada ,  Yasuhiro Kanamaru

发明人： Masahiro Matsumoto ,  Hiroshi Nakano ,  Masamichi Yamada ,  Keiji Hanzawa ,  Izumi Watanabe ,  Keiichi Nakada ,  Yasuhiro Kanamaru

IPC分类号： G01F1/68

CPC分类号： G01F15/006 ,  G01F1/6845 ,  G01F1/692

摘要： Conventional thermal flow measurement devices lack consideration for automobiles in severe environments. A detection element of the thermal flow measurement device according to the present invention is structured by the provision of a planar substrate made of a material having good thermal conductivity, such as silicon or ceramic, with a thin-walled portion (diaphragm). On the surface of the thin-walled portion, the detection element comprises a heat element as a heater heated to a temperature being different to a predetermined extent from the temperature of the air flow to be measured, temperature-detecting resistors as temperature-detecting means on both sides of the heat element, wiring portions formed of electrical conductors that draw signal lines from the heat element and the temperature-detecting resistors and that have a melting point of 2000° C. or higher, and pads.

摘要翻译： 传统的热流测量装置在恶劣环境中缺乏汽车的考虑。 根据本发明的热流测量装置的检测元件通过提供由具有良好导热性的材料（例如硅或陶瓷）制成的具有薄壁部分（隔膜）的平面基板构成。 在薄壁部分的表面上，检测元件包括作为加热器的加热元件加热到与待测量的空气流的温度不同的温度，作为温度检测装置的温度检测电阻器 在加热元件的两侧，由从导热元件和温度检测电阻器吸引信号线并且具有2000℃或更高熔点的电导体形成的布线部分和焊盘。

公开(公告)号：US20080016958A1

公开(公告)日：2008-01-24

申请号：US11765736

申请日：2007-06-20

申请人： Masahiro Matsumoto ,  Masamichi Yamada ,  Hiroshi Nakano ,  Keiji Hanzawa ,  Yasuhiro Kanamaru

发明人： Masahiro Matsumoto ,  Masamichi Yamada ,  Hiroshi Nakano ,  Keiji Hanzawa ,  Yasuhiro Kanamaru

IPC分类号： G01F1/68

CPC分类号： G01F1/6845 ,  G01F1/692 ,  G01F1/6986

摘要： The coupling capacitance of the wiring portions of a thermal type flow rate measuring apparatus is reduced so as to prevent a drop in the response characteristics. A detection element of the thermal type flow rate measuring apparatus includes a planar substrate made of silicon, ceramic, or the like, in which a diaphragm is formed. On the surface of the diaphragm, there are disposed a heat-generating resistor as a heat-generating element that is heated to a predetermined temperature difference from the temperature of air flow to be measured, a heat-generating element temperature-detecting resistor for detecting the temperature of the heat-generating resistor, and temperature-detecting resistors disposed on both sides of the heat-generating resistor. The detection element also includes wiring portions which have connecting terminals electrically connected to the heat-generating resistor and a wiring pattern electrically connected with the surface of the planar substrate.

摘要翻译： 热式流量测量装置的布线部分的耦合电容减小，以防止响应特性的下降。 热式流量测量装置的检测元件包括其中形成有隔膜的由硅，陶瓷等制成的平面基板。 在隔膜的表面上设置有发热电阻器作为发热元件，其被加热到与要测量的空气流的温度的预定温度差，用于检测的发热元件温度检测电阻器 发热电阻器的温度和设置在发热电阻器两侧的温度检测电阻器。 检测元件还包括具有与发热电阻器电连接的连接端子的布线部分和与平面基板的表面电连接的布线图案。

公开(公告)号：US20090000372A1

公开(公告)日：2009-01-01

申请号：US11814308

申请日：2006-02-20

申请人： Masahiro Matsumoto ,  Hiroshi Nakano ,  Masamichi Yamada ,  Keiji Hanzawa ,  Izumi Watanabe ,  Keiichi Nakada ,  Yasuhiro Kanamaru

发明人： Masahiro Matsumoto ,  Hiroshi Nakano ,  Masamichi Yamada ,  Keiji Hanzawa ,  Izumi Watanabe ,  Keiichi Nakada ,  Yasuhiro Kanamaru

IPC分类号： G01F1/69

CPC分类号： G01F15/006 ,  G01F1/6845 ,  G01F1/692

摘要： Conventional thermal flow measurement devices lack consideration for automobiles in severe environments. A detection element of the thermal flow measurement device according to the present invention is structured by the provision of a planar substrate made of a material having good thermal conductivity, such as silicon or ceramic, with a thin-walled portion (diaphragm). On the surface of the thin-walled portion, the detection element comprises a heat element as a heater heated to a temperature being different to a predetermined extent from the temperature of the air flow to be measured, temperature-detecting resistors as temperature-detecting means on both sides of the heat element, wiring portions formed of electrical conductors that draw signal lines from the heat element and the temperature-detecting resistors and that have a melting point of 2000° C. or higher, and pads.

摘要翻译： 传统的热流测量装置在恶劣环境中缺乏汽车的考虑。 根据本发明的热流测量装置的检测元件通过提供由具有良好导热性的材料（例如硅或陶瓷）制成的具有薄壁部分（隔膜）的平面基板构成。 在薄壁部分的表面上，检测元件包括作为加热器的加热元件加热到与待测量的空气流的温度不同的温度，作为温度检测装置的温度检测电阻器 在加热元件的两侧，由从导热元件和温度检测电阻器吸引信号线并且具有2000℃或更高熔点的电导体形成的布线部分和焊盘。

公开(公告)号：US07617723B2

公开(公告)日：2009-11-17

申请号：US11765736

申请日：2007-06-20

申请人： Masahiro Matsumoto ,  Masamichi Yamada ,  Hiroshi Nakano ,  Keiji Hanzawa ,  Yasuhiro Kanamaru

发明人： Masahiro Matsumoto ,  Masamichi Yamada ,  Hiroshi Nakano ,  Keiji Hanzawa ,  Yasuhiro Kanamaru

IPC分类号： G01F1/68

CPC分类号： G01F1/6845 ,  G01F1/692 ,  G01F1/6986

摘要： The coupling capacitance of the wiring portions of a thermal type flow rate measuring apparatus is reduced so as to prevent a drop in the response characteristics. A detection element of the thermal type flow rate measuring apparatus includes a planar substrate made of silicon, ceramic, or the like, in which a diaphragm is formed. On the surface of the diaphragm, there are disposed a heat-generating resistor as a heat-generating element that is heated to a predetermined temperature difference from the temperature of air flow to be measured, a heat-generating element temperature-detecting resistor for detecting the temperature of the heat-generating resistor, and temperature-detecting resistors disposed on both sides of the heat-generating resistor. The detection element also includes wiring portions which have connecting terminals electrically connected to the heat-generating resistor and a wiring pattern electrically connected with the surface of the planar substrate.

摘要翻译： 热式流量测量装置的布线部分的耦合电容减小，以防止响应特性的下降。 热式流量测量装置的检测元件包括其中形成有隔膜的由硅，陶瓷等制成的平面基板。 在隔膜的表面上设置有发热电阻器作为发热元件，其被加热到与要测量的空气流的温度的预定温度差，用于检测的发热元件温度检测电阻器 发热电阻器的温度和设置在发热电阻器两侧的温度检测电阻器。 检测元件还包括具有与发热电阻器电连接的连接端子的布线部分和与平面基板的表面电连接的布线图案。

公开(公告)号：US07287424B2

公开(公告)日：2007-10-30

申请号：US11210869

申请日：2005-08-25

申请人： Masahiro Matsumoto ,  Masamichi Yamada ,  Hiroshi Nakano ,  Keiji Hanzawa ,  Keiichi Nakada

发明人： Masahiro Matsumoto ,  Masamichi Yamada ,  Hiroshi Nakano ,  Keiji Hanzawa ,  Keiichi Nakada

IPC分类号： G01F1/68

CPC分类号： G01F5/00 ,  G01F1/6845

摘要： IN a thermal type flow measurement apparatus, a heating element is disposed in a fluid passage and generates heat by a passage of a current through itself. A first thermal sensitive element is disposed adjacent upstream of the heating element in a direction of fluid flow to be measured. A second thermal sensitive element is disposed adjacent downstream of the heating element in the direction of fluid flow to be measured. The fluid passage is provided with the heating element, the first thermal sensitive element, and the second thermal sensitive element. The fluid passage has an asymmetric structure with respect to the direction of fluid flow.Means for measuring a difference of temperatures is sensed by the first and the second thermal sensitive elements to produce a voltage according to a fluid flow rate. Heat control means for controlling the passage of the current through the heating element so that a sum with weights of respective temperatures sensed by the first and the second thermal sensitive elements reaches a preset value.

摘要翻译： 在热式流量测量装置中，加热元件设置在流体通道中，并且通过自身通过电流而产生热量。 第一热敏元件沿着待测量的流体流动的方向设置在加热元件的上游附近。 第二热敏元件沿着待测量的流体流动的方向设置在加热元件的下游附近。 流体通道设置有加热元件，第一热敏元件和第二热敏元件。 流体通道相对于流体流动的方向具有不对称结构。 通过第一和第二热敏元件检测用于测量温度差的装置，以根据流体流速产生电压。 用于控制通过加热元件的电流的热控制装置，使得由第一和第二热敏元件感测的相应温度的重量达到预设值。

公开(公告)号：US20070089503A1

公开(公告)日：2007-04-26

申请号：US10560896

申请日：2004-03-05

申请人： Hiroshi Nakano ,  Masamichi Yamada ,  Masahiro Matsumoto ,  Izumi Watanabe ,  Keiji Hanzawa

发明人： Hiroshi Nakano ,  Masamichi Yamada ,  Masahiro Matsumoto ,  Izumi Watanabe ,  Keiji Hanzawa

IPC分类号： G01F1/68

CPC分类号： G01F1/6965 ,  G01F1/6842 ,  G01F1/696

摘要： A thermal airflow meter excellent in flow-rate measurement accuracy is provided. The airflow meter has a flow-rate measuring element comprising a heat resistor and a temperature-compensating resistor which are formed on the a first base member. A second base member of the airflow meter, provided with a drive circuit and a signal processor, is housed in a casing holding the flow-rate measuring element. The flow-rate measuring element is disposed in an air passage. Of two temperature sensors for measuring temperature at each of two points in the thermal airflow meter, respectively, a first temperature sensor is provided on the fist substrate of the flow-rate measuring element, and a second temperature sensor is provided inside the casing. The signal processor has a function of computing an airflow rate, an air temperature, and an air passage wall face temperature on the basis of an output signal of the flow-rate measuring element and respective output signals of the first and second sensors.

公开(公告)号：US20060162442A1

公开(公告)日：2006-07-27

申请号：US11210869

申请日：2005-08-25

申请人： Masahiro Matsumoto ,  Masamichi Yamada ,  Hiroshi Nakano ,  Keiji Hanzawa ,  Keiichi Nakada

发明人： Masahiro Matsumoto ,  Masamichi Yamada ,  Hiroshi Nakano ,  Keiji Hanzawa ,  Keiichi Nakada

IPC分类号： G01F1/68

CPC分类号： G01F5/00 ,  G01F1/6845

摘要： IN a thermal type flow measurement apparatus, a heating element is disposed in a fluid passage and generates heat by a passage of a current through itself. A first thermal sensitive element is disposed adjacent upstream of the heating element in a direction of fluid flow to be measured. A second thermal sensitive element is disposed adjacent downstream of the heating element in the direction of fluid flow to be measured. The fluid passage is provided with the heating element, the first thermal sensitive element, and the second thermal sensitive element. The fluid passage has an asymmetric structure with respect to the direction of fluid flow. Means for measuring a difference of temperatures is sensed by the first and the second thermal sensitive elements to produce a voltage according to a fluid flow rate. Heat control means for controlling the passage of the current through the heating element so that a sum with weights of respective temperatures sensed by the first and the second thermal sensitive elements reaches a preset value.

摘要翻译： 在热式流量测量装置中，加热元件设置在流体通道中，并且通过自身通过电流而产生热量。 第一热敏元件沿着待测量的流体流动的方向设置在加热元件的上游附近。 第二热敏元件沿着待测量的流体流动的方向设置在加热元件的下游附近。 流体通道设置有加热元件，第一热敏元件和第二热敏元件。 流体通道相对于流体流动的方向具有不对称结构。 通过第一和第二热敏元件检测用于测量温度差的装置，以根据流体流速产生电压。 用于控制通过加热元件的电流的热控制装置，使得由第一和第二热敏元件感测的相应温度的重量达到预设值。

公开(公告)号：US20050229694A1

公开(公告)日：2005-10-20

申请号：US11052754

申请日：2005-02-09

申请人： Masahiro Matsumoto ,  Masamichi Yamada ,  Hiroshi Nakano ,  Izumi Watanabe ,  Keiji Hanzawa ,  Keiichi Nakada

发明人： Masahiro Matsumoto ,  Masamichi Yamada ,  Hiroshi Nakano ,  Izumi Watanabe ,  Keiji Hanzawa ,  Keiichi Nakada

IPC分类号： G01F1/698 ,  F02D41/18 ,  G01F1/68 ,  G01F1/684 ,  G01F1/692 ,  G01F1/696 ,  G01F1/699

CPC分类号： G01F1/6845 ,  F02D41/187 ,  G01F1/692 ,  G01F1/696 ,  G01F1/699

摘要： A heating resistance flow rate measuring apparatus which can use a power source of an ECU in an automobile without requiring an expensive protective circuit and regulator. Heating of temperature detecting resistors themselves causes temperature changes on the windward and leeward sides, and these temperature changes depend on the amounts of heat generated by the temperature detecting resistors. The amounts of heat generated by the temperature detecting resistors depend on a voltage value of the ECU power source applied to the temperature detecting resistors, and an error is caused in a sensor output depending on a variation in the voltage of the ECU power source. Based on the finding that suppressing the amount of heat generated by the temperature detecting resistors is effective in avoiding the sensor output error caused depending on a variation in the output voltage of the ECU power source, means for suppressing the amount of heat generated by the temperature detecting resistors is disposed.

摘要翻译： 一种能够在汽车中使用ECU的电源而不需要昂贵的保护电路和调节器的加热电阻流量测量装置。 温度检测电阻本身的加热引起迎风侧风和背风侧的温度变化，这些温度变化取决于温度检测电阻产生的热量。 由温度检测电阻器产生的热量取决于施加到温度检测电阻器的ECU电源的电压值，并且根据ECU电源的电压变化在传感器输出中引起误差。 基于这样的发现，抑制由温度检测电阻产生的热量对于避免根据ECU电源的输出电压的变化而导致的传感器输出误差是有效的，用于抑制由温度产生的热量的装置 设置检测电阻器。

公开(公告)号：US20110048127A1

公开(公告)日：2011-03-03

申请号：US12855347

申请日：2010-08-12

申请人： Masahiro MATSUMOTO ,  Hiroshi Nakano ,  Keiji Hanzawa ,  Masamichi Yamada

发明人： Masahiro MATSUMOTO ,  Hiroshi Nakano ,  Keiji Hanzawa ,  Masamichi Yamada

IPC分类号： G01N19/10 ,  G01F1/692

CPC分类号： G01N27/18

摘要： Provided is a high-precision, mechanically robust thermal humidity sensor. A detecting element 1 of the thermal humidity sensor of the present invention has a diaphragm (a bridge structure) 2 formed on a planar substrate which is formed from a material with high thermal conductivity such as silicon or ceramic. Formed on the diaphragm 2 are temperature detecting resistors 4, 5, 6, and 7 and a heating resistor 3 arranged in a manner surrounding the temperature detecting resistors. Humidity is detected based on the outputs of the temperature detecting resistors 4, 5, 6, and 7. Accordingly, humidity measurement errors that can possibly occur due to the leakage of heat through the diaphragm 2 to the planar substrate can be reduced.

摘要翻译： 提供了一种高精度，机械坚固的热湿度传感器。 本发明的热湿度传感器的检测元件1具有形成在由诸如硅或陶瓷等导热性高的材料形成的平面基板上的隔膜（桥结构）2。 形成在隔膜2上的是温度检测电阻4,5,6和7以及围绕温度检测电阻器布置的加热电阻3。 基于温度检测电阻4,5,6和7的输出检测湿度。因此，可以减少由于通过隔膜2的热量泄漏到平面基板而可能发生的湿度测量误差。

公开(公告)号：US07656624B2

公开(公告)日：2010-02-02

申请号：US11656994

申请日：2007-01-24

申请人： Masahiro Matsumoto ,  Masamichi Yamada ,  Hiroshi Nakano ,  Keiji Hanzawa ,  Ryo Sato

发明人： Masahiro Matsumoto ,  Masamichi Yamada ,  Hiroshi Nakano ,  Keiji Hanzawa ,  Ryo Sato

IPC分类号： H02H7/00

CPC分类号： H02H9/046 ,  H01L27/0248 ,  H02H11/002

摘要： An IC power protection circuit functions as a surge protection circuit and reverse connection protection circuit. The IC power protection circuit includes an error amplification circuit, positioned and integrated within an integrated circuit and a transistor positioned as a stand-alone element that is separate from the integrated circuit. The integrated circuit includes a sensor signal processing circuit that processes a signal of a sensor. A transistor protects the integrated circuit against a surge voltage from a battery terminal. A resistor is positioned between an output terminal of an error amplifier and a base terminal of the transistor to provide reverse connection protection. Another resistor is connected between a ground and a connection point between the above resistor and the output terminal to provide overvoltage protection for the integrated circuit. A starting resistor is connected between a collector and base of the transistor.

摘要翻译： IC电源保护电路用作浪涌保护电路和反向连接保护电路。 IC电源保护电路包括位于并集成在集成电路内的误差放大电路和定位为与集成电路分离的独立元件的晶体管。 集成电路包括处理传感器的信号的传感器信号处理电路。 晶体管保护集成电路免受来自电池端子的浪涌电压的影响。 电阻器位于误差放大器的输出端子和晶体管的基极端子之间，以提供反向连接保护。 另一个电阻连接在上述电阻和输出端之间的接地点和连接点之间，为集成电路提供过压保护。 启动电阻连接在晶体管的集电极和基极之间。