Invention Application
- Patent Title: VERTICAL-TYPE, INTEGRATED BIPOLAR DEVICE AND MANUFACTURING PROCESS THEREOF
- Patent Title (中): 垂直型,一体式双极设备及其制造工艺
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Application No.: US11779681Application Date: 2007-07-18
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Publication No.: US20080017895A1Publication Date: 2008-01-24
- Inventor: Piero Giorgio Fallica , Roberto Modica
- Applicant: Piero Giorgio Fallica , Roberto Modica
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Priority: ITTO2006A000525 20060718
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L21/84

Abstract:
A bipolar device is integrated in an active layer, wherein delimitation trenches surround respective active areas housing bipolar transistors of complementary types. Each active area accommodates a buried layer; a well region extending on top of the buried layer; a top sinker region extending between the surface of the device and the well region; a buried collector region extending on top of the well region and laterally with respect to the top sinker region; a base region, extending on top of the buried collector region laterally with respect to the top sinker region; and an emitter region extending inside the base region. The homologous regions of the complementary transistors have a similar doping level, being obtained by ion-implantation of epitaxial layers wherein the concentration of dopant added during the growth is very low, possibly zero.
Public/Granted literature
- US07898008B2 Vertical-type, integrated bipolar device and manufacturing process thereof Public/Granted day:2011-03-01
Information query
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