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US20080037944A1 Optical element and method for producing the same 失效
光学元件及其制造方法

Optical element and method for producing the same
摘要:
An optical element is provided that includes a base substrate, a waveguide substrate, and a thin film layer that is provided between the base substrate and the waveguide substrate and that has a single-layer structure of a multilayer structure including a film containing Ta2O5 or Nb2O5 as a principal component.
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