发明申请
US20080038481A1 FABRICATING AND CLEANING CHAMBER COMPONENTS HAVING TEXTURED SURFACES
审中-公开
具有纹理表面的织物和清洁室组件
- 专利标题： FABRICATING AND CLEANING CHAMBER COMPONENTS HAVING TEXTURED SURFACES
- 专利标题（中）： 具有纹理表面的织物和清洁室组件
-
申请号： US11874169申请日： 2007-10-17
-
公开(公告)号： US20080038481A1公开(公告)日： 2008-02-14
- 发明人: Brian West , Marc Schweitzer , Jennifer Watia
- 申请人： Brian West , Marc Schweitzer , Jennifer Watia
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 主分类号： B05D3/12
- IPC分类号： B05D3/12 ; B24C1/00 ; H05H1/48
摘要：
A method of fabricating a substrate processing chamber component involves forming a component having a textured surface and sweeping a jet of pressurized fluid across the textured surface of the component. The jet of fluid is pressurized sufficiently high to dislodge substantially all the particles from the textured surface. The method can be applied to dislodge grit particles from textured exposed surfaces formed by electromagnetic energy beam scanning and grit blasting. The method can also be applied to remove loosely adhered coating particles from the textured surfaces of coated components.
信息查询
