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公开(公告)号：US20050048876A1
公开(公告)日：2005-03-03
申请号：US10653713
申请日：2003-09-02
申请人： Brian West , Marc Schweitzer , Jennifer Watia
发明人： Brian West , Marc Schweitzer , Jennifer Watia
CPC分类号： C23C14/564 , B08B3/02 , H01L21/67051 , Y10T428/24355
摘要： A method of fabricating a substrate processing chamber component involves forming a component having a textured surface and sweeping a jet of pressurized fluid across the textured surface of the component. The jet of fluid is pressurized sufficiently high to dislodge substantially all the particles from the textured surface. The method can be applied to dislodge grit particles from textured exposed surfaces formed by electromagnetic energy beam scanning and grit blasting. The method can also be applied to remove loosely adhered coating particles from the textured surfaces of coated components.
摘要翻译： 制造基板处理室部件的方法包括形成具有纹理表面的部件，并且跨过部件的纹理化表面扫掠加压流体的射流。 流体射流被加压得足够高，以从织纹表面去除基本上所有的颗粒。 该方法可应用于通过电磁能量束扫描和喷砂处理形成的纹理暴露表面去除砂粒。 该方法还可以用于从被涂覆部件的织构化表面去除松散粘附的涂层颗粒。
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公开(公告)号：US20080038481A1
公开(公告)日：2008-02-14
申请号：US11874169
申请日：2007-10-17
申请人： Brian West , Marc Schweitzer , Jennifer Watia
发明人： Brian West , Marc Schweitzer , Jennifer Watia
CPC分类号： C23C14/564 , B08B3/02 , H01L21/67051 , Y10T428/24355
摘要： A method of fabricating a substrate processing chamber component involves forming a component having a textured surface and sweeping a jet of pressurized fluid across the textured surface of the component. The jet of fluid is pressurized sufficiently high to dislodge substantially all the particles from the textured surface. The method can be applied to dislodge grit particles from textured exposed surfaces formed by electromagnetic energy beam scanning and grit blasting. The method can also be applied to remove loosely adhered coating particles from the textured surfaces of coated components.
摘要翻译： 制造基板处理室部件的方法包括形成具有纹理表面的部件，并且跨过部件的纹理化表面扫掠加压流体的射流。 流体射流被加压得足够高，以从织纹表面去除基本上所有的颗粒。 该方法可应用于通过电磁能量束扫描和喷砂处理形成的纹理暴露表面去除砂粒。 该方法还可以用于从被涂覆部件的织构化表面去除松散粘附的涂层颗粒。
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公开(公告)号：US07264679B2
公开(公告)日：2007-09-04
申请号：US10777866
申请日：2004-02-11
CPC分类号： B08B7/0092 , B08B9/08 , C23C16/4407
摘要： In a method of cleaning a surface of a substrate processing chamber component to remove process deposits, the component surface is cooled to a temperature below about −40° C. to fracture the process deposits on the surface. The surface can be cooled by immersing the surface in a low temperature fluid, such as liquid nitrogen. In another version, the component surface is heated to fracture and delaminate the deposits, and optionally, subsequently rapidly cooled to form more fractures. The component surface cleaning can also be performed by bead blasting followed by a chemical cleaning step.
摘要翻译： 在清洗基板处理室部件的表面以去除工艺沉积物的方法中，将部件表面冷却至低于约-40℃的温度以破坏表面上的工艺沉积物。 表面可以通过将表面浸入诸如液氮的低温流体中来冷却。 在另一个版本中，组件表面被加热以使沉积物断裂并分层，并且任选地随后快速冷却以形成更多的裂缝。 组件表面清洁也可以通过喷丸处理，然后进行化学清洁步骤。
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公开(公告)号：US20050172984A1
公开(公告)日：2005-08-11
申请号：US10777866
申请日：2004-02-11
申请人： Marc Schweitzer , Jennifer Tiller , Brian West , Karl Brueckner
发明人： Marc Schweitzer , Jennifer Tiller , Brian West , Karl Brueckner
CPC分类号： B08B7/0092 , B08B9/08 , C23C16/4407
摘要： In a method of cleaning a surface of a substrate processing chamber component to remove process deposits, the component surface is cooled to a temperature below about −40° C. to fracture the process deposits on the surface. The surface can be cooled by immersing the surface in a low temperature fluid, such as liquid nitrogen. In another version, the component surface is heated to fracture and delaminate the deposits, and optionally, subsequently rapidly cooled to form more fractures. The component surface cleaning can also be performed by bead blasting followed by a chemical cleaning step.
摘要翻译： 在清洗基板处理室部件的表面以去除工艺沉积物的方法中，将部件表面冷却至低于约-40℃的温度以破坏表面上的工艺沉积物。 表面可以通过将表面浸入诸如液氮的低温流体中来冷却。 在另一个版本中，组件表面被加热以使沉积物断裂并分层，并且任选地随后快速冷却以形成更多的裂缝。 组件表面清洁也可以通过喷丸处理，然后进行化学清洁步骤。
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公开(公告)号：US20060105182A1
公开(公告)日：2006-05-18
申请号：US10989975
申请日：2004-11-16
CPC分类号： C23C14/564 , C23C16/4404 , H01J37/16 , H01J37/32504 , H01J37/32862 , H01J37/32871 , H01J2237/022 , H01L21/6875 , H01L21/68757 , Y10T428/24 , Y10T428/31678
摘要： A component for a substrate processing chamber has a structure having an overlying metal coating. The metal coating has a plurality of electron beam textured features that are formed by scanning an electron beam across a surface of the metal coating. The electron beam textured features include a plurality of depressions and protuberances on the surface that are capable of accumulating process deposits during processing of a substrate to reduce contamination of the substrate. The component having the metal coating provides improved processing results, and exhibits reduced erosion during cleaning processes performed to remove process deposits from the component.
摘要翻译： 用于基板处理室的部件具有具有上覆金属涂层的结构。 金属涂层具有通过扫描金属涂层表面上的电子束而形成的多个电子束纹理特征。 电子束纹理特征包括表面上的多个凹陷和突起，其能够在处理基底期间积累处理沉积物以减少基底的污染。 具有金属涂层的部件提供了改进的加工结果，并且在清洁过程中表现出减少的侵蚀，以从部件中除去工艺沉积物。
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公开(公告)号：US20140182662A1
公开(公告)日：2014-07-03
申请号：US13961723
申请日：2013-08-07
申请人： John R. West , Tyrus Hudson , Brian West
发明人： John R. West , Tyrus Hudson , Brian West
IPC分类号： H01L31/042 , F24J2/52
CPC分类号： F24S25/632 , F16B5/0084 , F16B21/02 , F24S25/10 , F24S25/16 , F24S25/20 , F24S25/61 , F24S25/636 , F24S25/65 , F24S25/67 , F24S25/70 , F24S2025/6006 , H02S20/00 , H02S20/23 , H02S30/10 , Y02B10/12 , Y02B10/20 , Y02E10/47 , Y02E10/50
摘要： The method and apparatus for forming and mounting a photovoltaic (PV) array of this invention is disclosed and provides, without limitation, (i) a PV module framing and coupling system which enables the attachment of PV modules to a roof or other mounting surface without requiring the use of separate structural support members which attach directly to and span between multiple PV modules in a formed PV array and (ii) an ancillary device attachment bracket, system, and method. One embodiment may provide a slidable parallel coupling for securely interlocking the outside surfaces of parallel frame members together in a side to side arrangement, thereby enabling the formation of a PV array with improved structural load distribution. Another embodiment may provide a photovoltaic module accessory bracket, comprising: a substantially rigid plate comprising a flexible spring tab; a first ear substantially rigidly positioned on the plate; a second ear positioned on the spring tab; wherein the spring tab flexes backward away from the plate during connection to a frame of a photovoltaic module to allow the first ear to engage the frame, and a forward force applied to the spring tab locks the second ear to the frame.
摘要翻译： 公开了用于形成和安装本发明的光伏（PV）阵列的方法和装置，并且提供（i）PV模块框架和耦合系统，其能够将PV模块附接到屋顶或其他安装表面，而无需 需要使用独立的结构支撑构件，其直接连接并形成在所形成的PV阵列中的多个PV模块之间，并且（ii）辅助装置附接支架，系统和方法。 一个实施例可以提供可滑动的平行联接器，用于将平行框架构件的外表面以一对侧布置的方式牢固地互锁在一起，从而能够形成具有改进的结构负载分布的PV阵列。 另一实施例可以提供一种光伏模块附件支架，包括：基本上刚性的板，包括柔性弹簧片; 基本上刚性地定位在板上的第一耳朵; 位于弹簧片上的第二个耳朵; 其中弹簧接头在连接到光伏模块的框架期间向后偏离板，以允许第一耳朵接合框架，并且施加到弹簧接头的向前的力将第二耳朵锁定到框架。
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7.发明授权Full-scale architectural template and method for installing construction elements for exhibitions, trade shows, conventions and events without damaging carpet or floor 有权全面的建筑模板和方法，用于安装展览，贸易展览，会议和活动的建筑元素，不会损坏地毯或地板公开(公告)号：US08533927B2
公开(公告)日：2013-09-17
申请号：US12904321
申请日：2010-10-14
申请人： Jay Atherton , Brian West , Eddie Crow
发明人： Jay Atherton , Brian West , Eddie Crow
IPC分类号： G01B3/00
CPC分类号： A47G27/0206 , E04B2001/3572 , E04F21/04 , G09B25/04
摘要： A method of installing temporary construction elements for an event without damaging a floor is disclosed. The method includes creating a digital file of an architectural template illustrating the construction elements. The method further includes printing the digital file as a full-scale architectural template. The full-scale architectural template comprises one or more sheets capable of protecting the floor during installation of the temporary construction elements, each sheet being a portion of the full-scale template. The method further includes placing and aligning the sheets on the floor so that the markings are positioned in the same location as the corresponding temporary construction elements should be and attaching the sheets to the floor. The method further includes installing the temporary construction elements on the sheets in accordance with the markings. The method further includes removing the sheets after installation of the construction elements.
摘要翻译： 公开了一种在不损坏地板的情况下安装用于事件的临时构造元件的方法。 该方法包括创建示出施工元件的建筑模板的数字文件。 该方法还包括将数字文件打印为全尺寸架构模板。 全尺寸建筑模板包括一个或多个能够在安装临时构造元件期间保护地板的板，每个板是全尺寸模板的一部分。 该方法还包括将片材放置和对准在地板上，使得标记位于与相应的临时构造元件应当相同的位置并且将片材附接到地板上。 该方法还包括根据标记将临时构造元件安装在片材上。 该方法还包括在安装构造元件之后移除片材。
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公开(公告)号：US08415469B2
公开(公告)日：2013-04-09
申请号：US12616079
申请日：2009-11-10
申请人： Prabha N. Ibrahim , Dean R. Artis , Ryan Bremer , Gaston Habets , Shumeye Mamo , Marika Nespi , Chao Zhang , Jiazhong Zhang , Yong-Liang Zhu , Rebecca Zuckerman , Brian West , Yoshisa Suzuki , Jianming Tsai , Klaus-Peter Hirth , Gideon Bollag , Wayne Spevak , Hanna Cho , Samuel J. Gillette , Guoxian Wu , Hongyao Zhu , Shenghua Shi
发明人： Prabha N. Ibrahim , Dean R. Artis , Ryan Bremer , Gaston Habets , Shumeye Mamo , Marika Nespi , Chao Zhang , Jiazhong Zhang , Yong-Liang Zhu , Rebecca Zuckerman , Brian West , Yoshisa Suzuki , Jianming Tsai , Klaus-Peter Hirth , Gideon Bollag , Wayne Spevak , Hanna Cho , Samuel J. Gillette , Guoxian Wu , Hongyao Zhu , Shenghua Shi
IPC分类号： C07D413/14 , C07D401/14 , C07D471/04 , C07F7/02
CPC分类号： C07D471/04 , A61K31/437 , A61K31/496 , A61K31/5377 , C07C37/62 , C07C39/27 , C07C45/00 , C07C45/673 , C07C45/71 , C07C47/565 , C07C47/575 , C07D209/08
摘要： Compounds active on protein kinases are described, as well as methods of using such compounds to treat diseases and conditions associated with aberrant activity of protein kinases.
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公开(公告)号：US20050271984A1
公开(公告)日：2005-12-08
申请号：US10863151
申请日：2004-06-07
申请人： Karl Brueckner , Brian West , Hong Wang
发明人： Karl Brueckner , Brian West , Hong Wang
CPC分类号： C23C14/564 , C23C16/4404 , G03F7/0015 , H01J37/32477
摘要： A method of fabricating a process chamber component having a textured surface includes applying a resist layer on an underlying surface of the component. A predetermined pattern of apertures is formed in the resist layer that exposes the underlying surface of the component. The underlying surface is etched through the apertures in the resist layer to form a textured surface having raised features with top corners. The resist layer is removed, and a treatment step is performed to form top corners that are rounded. In another method, the textured surface is formed by providing a patterned mask having apertures above the surface of the component. A material is sprayed through the apertures in the patterned mask and onto the surface to form a textured surface with raised features having the material.
摘要翻译： 制造具有纹理化表面的处理室部件的方法包括在部件的下表面上施加抗蚀剂层。 在抗蚀剂层中形成预定的孔径图案，其暴露组件的下表面。 底层表面通过抗蚀剂层中的孔蚀刻，以形成具有顶角的凸起特征的纹理表面。 去除抗蚀剂层，并且执行处理步骤以形成圆形的顶角。 在另一种方法中，纹理化表面通过提供在组件表面上方具有孔的图案化掩模形成。 将材料通过图案化掩模中的孔喷射到表面上以形成具有具有该材料的凸起特征的纹理表面。
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10.发明授权公开(公告)号：US09170031B2
公开(公告)日：2015-10-27
申请号：US12952095
申请日：2010-11-22
申请人： Brian West , Charles Wade Albritton
发明人： Brian West , Charles Wade Albritton
CPC分类号： F24S10/30 , F24F5/0096 , F24F2005/0064 , F24F2005/0067 , F24S20/67 , H02S40/44 , Y02A30/272 , Y02B10/10 , Y02B10/12 , Y02B10/20 , Y02B10/24 , Y02B10/70 , Y02E10/44 , Y02E10/60
摘要： An energy transfer module coupled to a thermal solar module includes a body having a first end member, a second end member, and four side members configured to enclose a first spatial region within a vicinity of the first end member and a second spatial region within a vicinity of the second end member. The first spatial region is in communication with the second spatial region. The module further includes one or more inlet openings provided at the first end member for inputting fluid flow from the thermal solar module. The module also includes an air filter disposed within the first spatial region to remove one or more impurities from the fluid flow. Additionally, the module includes a fan disposed between the first spatial region and the second spatial region to draw the fluid flow through the air filter. The fan is coupled to a drive motor. The module further includes a heat exchanger disposed in the first spatial region and an outlet provided on the second end member. Furthermore, the module includes an electrical source coupled to the fan. The electrical source is configured to power the drive motor to draw fluid flow through the heat exchanger.
摘要翻译： 耦合到热太阳能模块的能量传递模块包括具有第一端部构件，第二端构件和被配置为将第一空间区域包围在第一端构件附近的第一空间区域的第一端构件和第二空间区域内的第二空间区域的主体， 附近的第二端部件。 第一空间区域与第二空间区域通信。 该模块还包括设置在第一端部构件处的用于输入来自热太阳能模块的流体流的一个或多个入口。 模块还包括布置在第一空间区域内的空气过滤器，以从流体流中去除一种或多种杂质。 此外，模块包括设置在第一空间区域和第二空间区域之间的风扇，以抽取流过空气过滤器的流体流动。 风扇耦合到驱动电机。 模块还包括设置在第一空间区域中的热交换器和设置在第二端部构件上的出口。 此外，该模块包括耦合到风扇的电源。 电源被配置为为驱动电机供电以抽出流过热交换器的流体。
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