发明申请
US20080041312A1 Stage for plasma processing apparatus, and plasma processing apparatus
审中-公开
等离子体处理装置的阶段和等离子体处理装置
- 专利标题: Stage for plasma processing apparatus, and plasma processing apparatus
- 专利标题(中): 等离子体处理装置的阶段和等离子体处理装置
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申请号: US11889339申请日: 2007-08-10
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公开(公告)号: US20080041312A1公开(公告)日: 2008-02-21
- 发明人: Shoichiro Matsuyama , Shinji Himori , Atsushi Matsuura
- 申请人: Shoichiro Matsuyama , Shinji Himori , Atsushi Matsuura
- 优先权: JP2006-217872 20060810
- 主分类号: C23C16/458
- IPC分类号: C23C16/458
摘要:
[Object]To provide a stage for plasma processing apparatus, the stage being capable of improving uniformity of electric field strength in a plasma so as to enhance an in-plane uniformity of a plasma process to a substrate, and to provide a plasma processing apparatus provided with this stage. [Means for Solving the Problem]A stage 3 for a plasma processing apparatus 2 comprises: a conductive member 31 connected to a radiofrequency power source, the conductive member serving as an electrode for generating a plasma and/or an electrode for drawing ions from a plasma; a dielectric layer 32 covering a central part of an upper surface of the conductive member, for making uniform a radiofrequency electric field applied to a plasma through a substrate to be processed wafer W) placed on the placing surface; and an electrostatic chuck 33 laminated on the dielectric layer 35, the electrostatic chuck having an electrode film embedded therein. The electrode film satisfies δ/z≧1,000 (z; a thickness of the electrode film 35, 6; a skin depth of the electrode film for the electrostatic chuck as to a radiofrequency power supplied from the radiofrequency power source).
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