发明申请
- 专利标题： Force sensor and method for producing the same
- 专利标题（中）： 力传感器及其制造方法
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申请号： US11892493申请日： 2007-08-23
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公开(公告)号： US20080047366A1公开(公告)日： 2008-02-28
- 发明人: Nariaki Kuriyama , Jun Sasahara , Tadahiro Kubota , Daisuke Okamura , Takeshi Ohsato
- 申请人： Nariaki Kuriyama , Jun Sasahara , Tadahiro Kubota , Daisuke Okamura , Takeshi Ohsato
- 专利权人： Honda Motor Co., Ltd.
- 当前专利权人： Honda Motor Co., Ltd.
- 优先权： JP2006-227466 20060824
- 主分类号： G01L1/22
- IPC分类号： G01L1/22 ; B32B37/06 ; H01L21/00
摘要：
There is provided a method for producing a force sensor including: a force sensor chip; and an attenuator, in which the force sensor chip and the attenuator are joined at joint portions with a glass layer sandwiched therebetween. The method includes: a film forming step in which a glass film as the glass layer is formed on regions of the attenuator containing the joint portions or on regions of the force sensor chip containing the joint portions; and an anodic bonding step in which the force sensor chip and the attenuator are stacked as a stacked body in close contact with each other at the joint portions, and the glass film and the force sensor chip, or the glass film and the attenuator, are joined.
公开/授权文献
- US08033009B2 Method for producing a force sensor 公开/授权日：2011-10-11