发明申请
- 专利标题： METHODS FOR PLANARIZING A SEMICONDUCTOR CONTACTOR
- 专利标题（中）： 用于平面化半导体接触器的方法
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申请号： US11846012申请日： 2007-08-28
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公开(公告)号： US20080048688A1公开(公告)日： 2008-02-28
- 发明人: Gaetan Mathieu , Benjamin Eldridge , Gary Grube
- 申请人： Gaetan Mathieu , Benjamin Eldridge , Gary Grube
- 专利权人： FORMFACTOR, INC.
- 当前专利权人： FORMFACTOR, INC.
- 主分类号： G01R31/26
- IPC分类号： G01R31/26
摘要：
A planarizer for a probe card assembly. A planarizer includes a first control member extending from a substrate in a probe card assembly. The first control member extends through at least one substrate in the probe card assembly and is accessible from an exposed side of an exterior substrate in the probe card assembly. Actuating the first control member causes a deflection of the substrate connected to the first control member.
公开/授权文献
- US07737709B2 Methods for planarizing a semiconductor contactor 公开/授权日：2010-06-15
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