发明申请
- 专利标题： Semiconductor Wafer Handler
- 专利标题（中）： 半导体晶片处理器
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申请号： US11856307申请日： 2007-09-17
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公开(公告)号： US20080051018A1公开(公告)日： 2008-02-28
- 发明人: Christopher Schutte , George Wallace
- 申请人： Christopher Schutte , George Wallace
- 申请人地址： US TX Dallas 75265
- 专利权人： TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人： TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人地址： US TX Dallas 75265
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
A semiconductor wafer handler comprises a ring (70) attached to a hub (80) by a plurality of spokes (90). Vacuum is applied to the surface of the semiconductor wafer through orifices (100) containing in the ring (70). Water and/or nitrogen can be applied to the surface of the semiconductor wafer through orifices (110) contained in the spokes (90).
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