发明申请
US20080053373A1 Coating Installation Suitable For Clean Room Conditions 审中-公开
涂层安装适用于洁净室条件

  • 专利标题: Coating Installation Suitable For Clean Room Conditions
  • 专利标题(中): 涂层安装适用于洁净室条件
  • 申请号: US11572252
    申请日: 2005-07-14
  • 公开(公告)号: US20080053373A1
    公开(公告)日: 2008-03-06
  • 发明人: Dietrich MundWolfgang FukarekJurgen Leib
  • 申请人: Dietrich MundWolfgang FukarekJurgen Leib
  • 申请人地址: DE 55122 Mainz
  • 专利权人: SCHOTT AG
  • 当前专利权人: SCHOTT AG
  • 当前专利权人地址: DE 55122 Mainz
  • 优先权: DE102004035335.2 20040721
  • 国际申请: PCT/EP05/07652 WO 20050714
  • 主分类号: B05C11/00
  • IPC分类号: B05C11/00
Coating Installation Suitable For Clean Room Conditions
摘要:
At least one shielding device, which protects the vacuum chamber walls and/or the components arranged in the chamber from undesired deposits of the layer starting material is arranged in the vacuum chamber of a coating installation according to the invention in which vitreous, glass-ceramic and/or ceramic layers are applied to substrates by deposition from the gas phase. It is important that in the event of temperature changes in the vacuum chamber, the expansion or contraction of the shielding device corresponds to the expansion or contraction of the vitreous, glass-ceramic or ceramic layer or deposits.
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