发明申请
- 专利标题： Probe
- 专利标题（中）： 探测
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申请号： US10565156申请日： 2005-05-19
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公开(公告)号： US20080054916A1公开(公告)日： 2008-03-06
- 发明人: Kazumichi Machida , Atsuo Urata , Takeshi Konno , Akira Ishida , Mitsuru Egashira , Mikihiko Kobayashi
- 申请人： Kazumichi Machida , Atsuo Urata , Takeshi Konno , Akira Ishida , Mitsuru Egashira , Mikihiko Kobayashi
- 优先权： JP2004-161844 20040531
- 国际申请： PCT/JP05/09177 WO 20050519
- 主分类号： G01R1/067
- IPC分类号： G01R1/067 ; G01R31/02
摘要：
It is an object of the present invention to provide a probe which can provide stable electrical conduction to an electrode of an object to be measured even when it is miniaturized. A probe 100 comprises a columnar contact part 110 which can come in contact with an electrode 10 of an object to be measured almost perpendicularly, and a base end (not shown) connected to the contact part 110, the contact part 110 comprises a base part 111 and an expansion part 111a bonded to an end of the base part 111 in a width direction, and the expansion part 111a is formed of a material having a thermal expansion coefficient higher than that of the base part 111.
公开/授权文献
- US07692438B2 Bimetallic probe with tip end 公开/授权日：2010-04-06