Apparatus and methods for inspecting a workpiece are provided. According to one embodiment, a method for inspecting a workpiece comprises illuminating at least a portion of the workpiece with at least one illumination beam and capturing at least one image including at least on line signature formed by illuminating the workpiece with the illumination beam. The method further includes performing two-dimensional and three-dimensional processes on the captured image and classifying at least one feature associated with the workpiece based at least in part on data generated by the two-dimensional and three-dimensional processes.