发明申请
US20080061335A1 Semiconductor memory and method for manufacturing the semiconductor memory
失效
用于制造半导体存储器的半导体存储器和方法
- 专利标题: Semiconductor memory and method for manufacturing the semiconductor memory
- 专利标题(中): 用于制造半导体存储器的半导体存储器和方法
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申请号: US11898297申请日: 2007-09-11
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公开(公告)号: US20080061335A1公开(公告)日: 2008-03-13
- 发明人: Yoshinori Kumura , Tohru Ozaki , Iwao Kunishima
- 申请人: Yoshinori Kumura , Tohru Ozaki , Iwao Kunishima
- 优先权: JPP2006-248459 20060913
- 主分类号: H01L27/108
- IPC分类号: H01L27/108 ; H01L21/8242
摘要:
According to an aspect of the present invention, there is provided a semiconductor memory including a lower electrode, a first insulating region formed in the same layer as the lower electrode, a ferroelectric film formed on the lower electrode and on the first insulating region, an upper electrode formed on the ferroelectric film, a second insulating region formed in the same layer as the upper electrode and a transistor. The first insulating region partitions the lower electrode. The second insulating region partitions the upper electrode. The transistor includes a first impurity region connected to the lower electrode and a second impurity region connected to the upper electrode. At least one of the first insulating region and the second insulating region is formed by insulating the lower electrode or the upper electrode.
公开/授权文献
- US07763920B2 Semiconductor memory having ferroelectric capacitor 公开/授权日:2010-07-27