发明申请
- 专利标题: ELECTROSTATIC CHUCK DEVICE
- 专利标题(中): 静电切割装置
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申请号: US11834957申请日: 2007-08-07
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公开(公告)号: US20080062609A1公开(公告)日: 2008-03-13
- 发明人: Shinji HIMORI , Shoichiro MATSUYAMA , Atsushi MATSUURA , Hiroshi INAZUMACHI , Mamoru KOSAKAI
- 申请人: Shinji HIMORI , Shoichiro MATSUYAMA , Atsushi MATSUURA , Hiroshi INAZUMACHI , Mamoru KOSAKAI
- 优先权: JP2006-218448 20060810
- 主分类号: H01L21/683
- IPC分类号: H01L21/683
摘要:
An electrostatic chuck device includes: an electrostatic chuck section including a substrate, which has a main surface serving as a mounting surface on which a plate-like sample is mounted and an electrostatic-adsorption inner electrode built therein, and a power supply terminal for applying a DC voltage to the electrostatic-adsorption inner electrode; and a metal base section that is fixed to the other main surface of the electrostatic chuck section so as to be incorporated into a body and that serves as a high frequency generating electrode. Here, the electrostatic-adsorption inner electrode has one or more electrode portions, and a resistance value of a distance between a point corresponding to a center axis of the substrate or a point closest to the center axis and a point most distant from the center axis among distances between two points in the electrode portion is in the range of 102Ω to 1010Ω.