Invention Application
- Patent Title: THERMOELASTIC SELF-ACTUATION IN PIEZORESISTIVE RESONATORS
- Patent Title (中): 激光谐振器中的热自动启动
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Application No.: US11857615Application Date: 2007-09-19
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Publication No.: US20080068000A1Publication Date: 2008-03-20
- Inventor: Igor Bargatin , Jessica Arlett , Michael Roukes , Inna Kozinsky , John Aldridge , Edward Myers
- Applicant: Igor Bargatin , Jessica Arlett , Michael Roukes , Inna Kozinsky , John Aldridge , Edward Myers
- Main IPC: G01R19/00
- IPC: G01R19/00 ; H01L21/00
Abstract:
Systems and methods for thermally actuating piezoresistive cantilevers are described. One embodiment includes a nanoelectromechanical resonator connected in at least one location to a substrate, an electrically conductive path formed on the resonator and a signal source connected to the electrically conductive path and configured to provide an oscillating actuation signal capable of exciting a resonant mode in the resonator.
Public/Granted literature
- US07555938B2 Thermoelastic self-actuation in piezoresistive resonators Public/Granted day:2009-07-07
Information query
