- 专利标题: SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
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申请号: US11941791申请日: 2007-11-16
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公开(公告)号: US20080073684A1公开(公告)日: 2008-03-27
- 发明人: Osamu Hidaka , Iwao Kunishima , Hiroyuki Kanaya
- 申请人: Osamu Hidaka , Iwao Kunishima , Hiroyuki Kanaya
- 优先权: JP2003-398162 20031127
- 主分类号: H01L27/105
- IPC分类号: H01L27/105
摘要:
A semiconductor memory device includes a semiconductor substrate having a first region and a second region, a transistor placed in the first region of the semiconductor substrate, a first insulating film formed on the semiconductor substrate in the first and second regions and on the transistor, a first ferroelectric capacitor formed on the first insulating film in the first region and electrically connected to the transistor, a hydrogen barrier film formed above the first ferroelectric capacitor and above the first insulating film in the first and second regions, a first contact penetrating the hydrogen barrier film in the first region and electrically connected to the first ferroelectric capacitor, and a second contact which penetrates the hydrogen barrier film in the second region and which is in a floating state.
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