发明申请
- 专利标题： MOULD HAVING NANO-SCALED HOLES
- 专利标题（中）： 具有纳米尺度的模具
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申请号： US11617971申请日： 2006-12-29
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公开(公告)号： US20080073799A1公开(公告)日： 2008-03-27
- 发明人: DING WANG , PENG-CHENG SONG , CHANG-HONG LIU , SHOU-SHAN FAN
- 申请人： DING WANG , PENG-CHENG SONG , CHANG-HONG LIU , SHOU-SHAN FAN
- 申请人地址： CN Beijing TW Tu-Cheng
- 专利权人： TSINGHUA UNIVERSITY,HON HAI PRECISION INDUSTRY CO., LTD.
- 当前专利权人： TSINGHUA UNIVERSITY,HON HAI PRECISION INDUSTRY CO., LTD.
- 当前专利权人地址： CN Beijing TW Tu-Cheng
- 优先权： CN200610062719.3 20060922
- 主分类号： H01L23/48
- IPC分类号： H01L23/48
摘要：
A mould includes a base having a first surface and a second surface opposite to the first surface; and a plurality of nano-scaled holes defined through the base. Each nano-scaled hole extends from the first surface to the second surface of the base and is parallel to each other and oriented substantially perpendicular to the first and second surface.