发明申请
US20080088651A1 Divided mirror pixels for deformable mirror device 审中-公开
用于可变形反射镜装置的分立镜像

Divided mirror pixels for deformable mirror device
摘要:
A mirror device comprising a plurality of mirror elements for modulating illumination light, and each of the mirror elements has a plural number of sub-mirror elements that is a single mirror element divided approximately perpendicularly in an incidence direction of illumination light. A projection apparatus has the mirror device and can project images.
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