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1.发明授权公开(公告)号：US08858811B2
公开(公告)日：2014-10-14
申请号：US12381587
申请日：2009-03-12
CPC分类号： G02B26/0833
摘要： A method for manufacturing a device comprising an elastic member on a substrate includes steps of: forming a sacrificial layer by forming a plurality of sacrificial sub-layers on the substrate; forming a plate member in or on the sacrificial layers connected to the substrate and substantially parallel to a top surface of the substrate; and removing the sacrificial sub-layers after forming the plate member by removing the sacrificial sub-layers in an order different from the reverse order of forming the sacrificial sub-layers.
摘要翻译： 一种在衬底上制造包括弹性构件的装置的方法，包括以下步骤：通过在衬底上形成多个牺牲子层来形成牺牲层; 在连接到所述基板并且基本上平行于所述基板的顶表面的所述牺牲层中或其上形成板构件; 并且通过以不同于形成牺牲子层的相反顺序的顺序去除牺牲子层，在形成板构件之后去除牺牲子层。
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公开(公告)号：US08619352B2
公开(公告)日：2013-12-31
申请号：US12231909
申请日：2008-09-05
CPC分类号： G02B26/0841 , H01L2924/16195
摘要： The present invention provides a projection apparatus that includes a mirror element and a drive circuit for driving a laser light source for projecting an illumination light. The projection apparatus further includes mirror device for modulating the illumination light and a projection lens for projecting the modulated light from the mirror element. The mirror device is disposed on a device substrate and packaged in a package substrate made of a transparent silicon material with a metallic thermal transfer path connected to the device substrate and a cover glass covering the package substrate. The distance between the mirror and the bottom surface of the cover glass is larger than the focal length of the projection lens.
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公开(公告)号：US07948505B2
公开(公告)日：2011-05-24
申请号：US11893660
申请日：2007-08-16
申请人： Kazuma Arai , Fusao Ishii , Yoshihiro Maeda , Hirotoshi Ichikawa
发明人： Kazuma Arai , Fusao Ishii , Yoshihiro Maeda , Hirotoshi Ichikawa
CPC分类号： H04N9/3123
摘要： The present invention provides an image signal processor, comprising: (a) an input circuit for receiving and/or holding an image signal of N-bit binary data word, where N is a positive integer; (b) a data converter converting at least M-bit data of binary data into non-binary data having multiple bits, where M is a positive integer and N≧M≧2, wherein (c) all bits of the non-binary data have a weight which is equal to, or less than, that of the least significant bit of the M-bit data of binary data; and (d) the data converter outputting the each bit of the non-binary data in sequence starting from an equal data value.
摘要翻译： 本发明提供了一种图像信号处理器，包括：（a）用于接收和/或保持N位二进制数据字的图像信号的输入电路，其中N是正整数; （b）将至少将二进制数据的M位数据转换成具有多位的非二进制数据的数据转换器，其中M是正整数，N≥M≥2，其中（c）非二进制数据的所有位 具有等于或小于二进制数据的M位数据的最低有效位的权重; 和（d）数据转换器从相等的数据值开始依次输出非二进制数据的每一位。
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公开(公告)号：US07944600B2
公开(公告)日：2011-05-17
申请号：US12151218
申请日：2008-05-02
IPC分类号： G02B26/00
CPC分类号： G03B21/28 , G02B26/0841 , Y10T29/49002
摘要： A micromirror device includes an elastic hinge for supporting a mirror on a substrate, and an address electrode for deflecting the mirror. The device further includes a protective layer and an oriented monolayer laid to cover a stopper also functioning as an address electrode provided below the mirror and between the mirror and the substrate.
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公开(公告)号：US07876488B2
公开(公告)日：2011-01-25
申请号：US12383701
申请日：2009-03-25
申请人： Yoshihiro Maeda , Fusao Ishii , Hirotoshi Ichikawa
发明人： Yoshihiro Maeda , Fusao Ishii , Hirotoshi Ichikawa
CPC分类号： G02B26/0833
摘要： The present invention provides a mirror device, comprising: a substrate; a mirror disposed approximately in parallel to the substrate above the substrate; and a hinge supported on and extended approximately perpendicularly from the substrate for supporting the mirror, wherein the hinge is connected to the mirror with a first edge part of the hinge buried in the mirror.
摘要翻译： 本发明提供一种镜装置，包括：基板; 大致平行于基板上方的基板设置的反射镜; 以及铰链，其支撑在所述基板上并大致垂直于所述基板延伸，用于支撑所述反射镜，其中所述铰链连接到所述反射镜，所述铰链的第一边缘部分埋在所述反射镜中。
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公开(公告)号：US07760415B2
公开(公告)日：2010-07-20
申请号：US12378658
申请日：2009-02-18
CPC分类号： G02B26/0833 , H04N5/7458 , H04N9/315
摘要： The present invention provides a mirror device, comprising: a mirror; an elastic hinge for supporting the mirror and the elastic hinge has a specific electric resistance. The mirror device further includes an electrode for controlling the mirror, wherein a voltage is applied to the elastic hinge for a predetermined period in synchronous with a change of an electric voltage applied to the electrode.
摘要翻译： 本发明提供了一种镜装置，包括：反射镜; 用于支撑反射镜和弹性铰链的弹性铰链具有比电阻。 反射镜装置还包括用于控制反射镜的电极，其中与施加到电极的电压的变化同步地，电压被施加到弹性铰链一段预定时间段。
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公开(公告)号：US07755830B2
公开(公告)日：2010-07-13
申请号：US12378655
申请日：2009-02-18
CPC分类号： G02B26/0833
摘要： The present invention provides a mirror device, comprising: an electrode placed on a substrate; a memory circuit connected to the electrode; an elastic hinge disposed near said electrode and extending from said substrate for supporting a mirror above said electrode wherein said elastic hinge having a negative temperature coefficient of resistance.
摘要翻译： 本发明提供了一种镜装置，包括：放置在基板上的电极; 连接到电极的存储电路; 弹性铰链，设置在所述电极附近并且从所述基板延伸，用于支撑所述电极上方的反射镜，其中所述弹性铰链具有负的温度系数电阻。
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公开(公告)号：US20100067096A1
公开(公告)日：2010-03-18
申请号：US12590754
申请日：2009-11-13
申请人： Hirotoshi Ichikawa , Yoshihiro Maeda , Fusao Ishii
发明人： Hirotoshi Ichikawa , Yoshihiro Maeda , Fusao Ishii
CPC分类号： G02B26/0841 , H04N5/7458 , H04N9/315
摘要： The present invention discloses an image display system implemented with a spatial light modulator (SLM) having a plurality of pixel elements wherein each of the pixel elements further comprises an electrode having a structural body comprising: a first electrically conductive layer; a second electrically conductive layer; and a semiconductor layer disposed adjacently to the first electric conductive layer and second electric conductive layer and the semiconductor layer further comprises a doped conductive area for electrically connecting the first electric conductive layer and second electric conductive layer.
摘要翻译： 本发明公开了一种使用具有多个像素元件的空间光调制器（SLM）实现的图像显示系统，其中每个像素元件还包括具有结构体的电极，包括：第一导电层; 第二导电层; 并且与第一导电层和第二导电层和半导体层相邻设置的半导体层还包括用于电连接第一导电层和第二导电层的掺杂导电区域。
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公开(公告)号：US07652813B2
公开(公告)日：2010-01-26
申请号：US12220770
申请日：2008-07-28
CPC分类号： G02B26/0841
摘要： A mirror device comprises: an electrode which is covered with a protective film made of a material containing a semiconductor material and is placed on a substrate; a mirror placed above the electrode; and an electrically conductive hinge placed between the mirror and the electrode, wherein an opening part is formed in a part of the protective film, and the hinge penetrates the protective film in the opening part thereof.
摘要翻译： 镜装置包括：电极，被覆有由含有半导体材料的材料制成的保护膜并放置在基板上; 放在电极上方的镜子; 以及放置在反射镜和电极之间的导电铰链，其中开口部分形成在保护膜的一部分中，并且铰链在其开口部分中穿透保护膜。
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10.发明申请公开(公告)号：US20090257110A1
公开(公告)日：2009-10-15
申请号：US12231685
申请日：2008-09-04
申请人： Hirotoshi Ichikawa , Yoshihiro Maeda , Fusao Ishii
发明人： Hirotoshi Ichikawa , Yoshihiro Maeda , Fusao Ishii
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , G02B27/1026 , G02B27/1033 , G02B27/146 , G02B27/149
摘要： The present invention provides a mirror device, comprising: a plurality of deflectable mirrors; an elastic member for deflectably supporting the mirror; a drive electrode for driving the mirror; a control circuit for giving electric charge to the drive electrode and controlling the deflecting direction of the mirror; and a substrate on which the drive electrode and the elastic member, wherein the drive electrode is placed within an area on the substrate the mirror is projected on, has an outer form constituted by sides approximately in parallel to the outer peripheral lines of the present mirror and by sides approximately parallel to the deflection axis of the present mirror, or a form obtained by dividing the aforementioned outer form into a plurality thereof, and also fills the role of a stopper for regulating the deflection angle of the mirror.
摘要翻译： 本发明提供了一种镜装置，包括：多个可偏转镜; 用于偏转地支撑所述反射镜的弹性构件; 用于驱动反射镜的驱动电极; 用于向驱动电极提供电荷并控制反射镜的偏转方向的控制电路; 以及驱动电极和弹性部件的基板，其中驱动电极被放置在反射镜投影的基板上的区域内，具有由大致平行于本反射镜的外周线的侧面构成的外部形状 以及大致平行于本反射镜的偏转轴的侧面，也可以是通过将前述的外部形状分割为多个而形成的形状，并且还填充了用于调整反射镜的偏转角度的挡块的作用。
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