发明申请
US20080092947A1 PULSE PLATING OF A LOW STRESS FILM ON A SOLAR CELL SUBSTRATE
审中-公开
在太阳能电池基板上的低应力膜的脉冲电镀
- 专利标题: PULSE PLATING OF A LOW STRESS FILM ON A SOLAR CELL SUBSTRATE
- 专利标题(中): 在太阳能电池基板上的低应力膜的脉冲电镀
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申请号: US11552497申请日: 2006-10-24
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公开(公告)号: US20080092947A1公开(公告)日: 2008-04-24
- 发明人: Sergey Lopatin , Charles Gay , David Eaglesham , John O. Dukovic , Nicolay Y. Kovarsky
- 申请人: Sergey Lopatin , Charles Gay , David Eaglesham , John O. Dukovic , Nicolay Y. Kovarsky
- 专利权人: APPLIED MATERIALS, INC.
- 当前专利权人: APPLIED MATERIALS, INC.
- 主分类号: H01L31/00
- IPC分类号: H01L31/00
摘要:
Embodiments of the invention contemplate the formation of a low cost solar cell metal contact structure that has improved electrical and mechanical properties through the use of an electrochemical plating process. The resistance of interconnects formed in a solar cell device greatly affects the efficiency of the solar cell. It is thus desirable to form a solar cell device that has a low resistance connections that is reliable and cost effective. One or more embodiments of the invention described herein are adapted to form a low cost and reliable interconnecting layer using an electrochemical plating process containing common metal, such as copper. However, generally the electroplated portions of the interconnecting layer may contain a substantially pure metal or a metal alloy layer. Methods are discussed herein that are used to form a solar cell containing conductive metal interconnect layer(s) that have a low intrinsic stress.
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