A semiconductor substrate for transmitting a differential pair is provided. The semiconductor substrate includes a substrate body and at least one via. The via has an opening on a surface layer of the substrate body and includes a first conductive element, a second conductive element and a ground element therein. The first conductive element, the second conductive element and the ground element are electrically isolated to one another. The ground element is electrically connected to a ground layer of the substrate body. The first conductive element and the second conductive element pass through the ground layer of the substrate body and are electrically isolated with the ground layer of the substrate body. The first conductive element is used for transmitting a positive differential signal and the second conductive element is used for transmitting a negative differential signal.