Invention Application
US20080094087A1 Device for detecting chip location and method of detecting chip location using the device 审中-公开
用于检测芯片位置的装置和使用该装置检测芯片位置的方法

  • Patent Title: Device for detecting chip location and method of detecting chip location using the device
  • Patent Title (中): 用于检测芯片位置的装置和使用该装置检测芯片位置的方法
  • Application No.: US11827689
    Application Date: 2007-07-13
  • Publication No.: US20080094087A1
    Publication Date: 2008-04-24
  • Inventor: Ho-jin Lee
  • Applicant: Ho-jin Lee
  • Applicant Address: KR Suwon-si
  • Assignee: Samsung Electronics Co., Ltd.
  • Current Assignee: Samsung Electronics Co., Ltd.
  • Current Assignee Address: KR Suwon-si
  • Priority: KR10-2006-0102472 20061020
  • Main IPC: G01R31/02
  • IPC: G01R31/02 G01J5/00
Device for detecting chip location and method of detecting chip location using the device
Abstract:
In a device for detecting a chip location and a method of detecting a chip location using the device, the device includes a chuck to which a wafer to be inspected is fixable, an infrared irradiation unit capable of irradiating infrared light to a target semiconductor chip of the wafer from the backside of the wafer, and a scope disposed opposite to the infrared irradiation unit with respect to the wafer. In this manner, it can be readily be determined whether the scope is aligned with a target semiconductor chip to which a probe card is connected for inspection by a backside emission method. Furthermore, the target semiconductor chip to be inspected can be readily detected among semiconductor chips viewed through the scope. Therefore, TAT (turn around time) for inspection can be largely reduced.
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