发明申请
- 专利标题: POSITIVE RESIST COMPOSITION
- 专利标题(中): 积极抵抗组成
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申请号: US11926479申请日: 2007-10-29
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公开(公告)号: US20080096130A1公开(公告)日: 2008-04-24
- 发明人: Koji Shirakawa , Toru Fujimori , Shoichiro Yasunami
- 申请人: Koji Shirakawa , Toru Fujimori , Shoichiro Yasunami
- 专利权人: FUJIFILM Corporation
- 当前专利权人: FUJIFILM Corporation
- 优先权: JPP.2003-094331 20030331
- 主分类号: G03C1/73
- IPC分类号: G03C1/73
摘要:
A positive resist composition comprising (a) a resin that is decomposed by the action of an acid to increase solubility in an alkali developing solution, contains a structural unit having a group represented by formula (X) defined in the specification, has a weight average molecular weight of not more than 5,000, and contains an acid decomposable group in an amount of not more than 40% based on the sum total of a number of the acid decomposable group and a number of an alkali-soluble group not protected with the acid decomposable group, and (b) a compound that generates an acid upon irradiation of an actinic ray or radiation.
公开/授权文献
- US08080362B2 Positive resist composition 公开/授权日:2011-12-20
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