发明申请
- 专利标题: Semiconductor Device
- 专利标题(中): 半导体器件
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申请号: US11792471申请日: 2006-09-21
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公开(公告)号: US20080100348A1公开(公告)日: 2008-05-01
- 发明人: Kimihiko Yamashita , Yasunori Hashimoto
- 申请人: Kimihiko Yamashita , Yasunori Hashimoto
- 优先权: JP2005-299767 20051014
- 国际申请: PCT/JP06/19231 WO 20060921
- 主分类号: G01R19/00
- IPC分类号: G01R19/00 ; H01L29/00
摘要:
A semiconductor device, includes a lower layer side insulation film; a wiring pattern formed on the lower layer side insulation film; a base insulation film formed on the lower layer side insulation film and the wiring pattern; and a plurality of metal thin film resistance elements formed on the base insulation film; wherein a connection hole is formed in the base insulation film on the wiring pattern; the wiring pattern and the metal thin film resistance element are electrically connected in the connection hole; the metal thin film resistance element has a belt shape part arranged separately from the connection hole and a connection part continuously formed with the belt shape part and connected to the wiring pattern in the connection hole; and the connection parts of at least two of the metal thin film resistance element are formed in the single connection hole with a gap in between said connection parts.
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