发明申请
- 专利标题： ARRANGEMENT OF TWO CONNECTED BODIES
- 专利标题（中）： 两个连接体的安排
-
申请号： US11842313申请日： 2007-08-21
-
公开(公告)号： US20080100815A1公开(公告)日： 2008-05-01
- 发明人: Hubert Holderer , Claudia Ekstein
- 申请人： Hubert Holderer , Claudia Ekstein
- 申请人地址： DE Oberkochen 73447
- 专利权人： CARL ZEISS SMT AG
- 当前专利权人： CARL ZEISS SMT AG
- 当前专利权人地址： DE Oberkochen 73447
- 优先权： DE102006038992.1 20060821
- 主分类号： G03B27/54
- IPC分类号： G03B27/54 ; B23P11/00
摘要：
Arrangements of a first body and a second body connected to the first body, as well as related systems and methods, are disclosed. The arrangements, systems and methods can be used, for example, with optical devices, such as in the field of microlithography systems used to manufacture of microelectronic devices.
信息查询
