发明申请
- 专利标题： Fine Stage Z Support Apparatus
- 专利标题（中）： 精细级Z支持装置
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申请号： US11666858申请日： 2005-11-04
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公开(公告)号： US20080105069A1公开(公告)日： 2008-05-08
- 发明人: Michael B. Binnard , Andrew J. Hazelton , Douglas C. Watson , Yoichi Arai
- 申请人： Michael B. Binnard , Andrew J. Hazelton , Douglas C. Watson , Yoichi Arai
- 国际申请： PCT/US05/40229 WO 20051104
- 主分类号： A47J43/08
- IPC分类号： A47J43/08 ; B65H1/00 ; F16M11/00 ; H01L21/00
摘要：
An apparatus for supporting an object is disclosed. The apparatus includes an air bearing coupled to an air bellows. When used in a vacuum environment, the apparatus preferably includes an air bearing housing with vacuum to remove the pressurized fluid used in the air bearing.
信息查询
