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1.发明授权Method for determining a commutation offset and for determining a compensation map for a stage 有权用于确定换向偏移和用于确定载物台的补偿图的方法公开(公告)号：US09465305B2
公开(公告)日：2016-10-11
申请号：US13101264
申请日：2011-05-05
申请人： Pai-Hsueh Yang , Scott Coakley , Michael B. Binnard , Kazuhiro Hirano , Bausan Yuan , Shiang-Lung Koo
发明人： Pai-Hsueh Yang , Scott Coakley , Michael B. Binnard , Kazuhiro Hirano , Bausan Yuan , Shiang-Lung Koo
CPC分类号： G03F7/70758 , G03F7/70516 , G03F7/70775 , H02P6/006
摘要： A method for determining a commutation offset for a mover (250A) of a mover assembly (220C) that moves and positions a stage (220A) relative to a stage base (220B) includes controlling the mover assembly (220C) in a closed loop fashion to maintain the position of the stage (220A) along a first axis and along a second axis with the stage (220A) levitated above the stage base (220B). The method also includes the steps of (i) directing current to a coil array (240) of the mover assembly (220C) so that the mover assembly (220C) imparts a disturbance on the stage (220A); and (ii) evaluating one or more forces generated by the mover assembly (220C) as a result of the disturbance on the stage (220A) created by the mover (250A). Further, a method for generating a compensation map (1402) includes sequentially directing a plurality of excitation signals to the control of the mover assembly (220C) and determining the control commands that result from the plurality of excitation signals.
摘要翻译： 用于确定相对于台架（220B）移动和定位平台（220A）的移动器组件（220C）的移动器（250A）的换向偏移的方法包括以闭环方式控制所述动子组件（220C） 以使台架（220A）沿着第一轴线并且沿着第二轴线保持台架（220A）的位置，台架（220A）悬浮在平台底座（220B）上方。 该方法还包括以下步骤：（i）将电流引导到移动器组件（220C）的线圈阵列（240），使得移动器组件（220C）在平台（220A）上施加干扰; 以及（ii）评估由所述移动器组件（220C）产生的由所述移动器（250A）产生的所述平台（220A）上的干扰所产生的一个或多个力。 此外，用于产生补偿图（1402）的方法包括将多个激励信号顺序地引导到移动器组件（220C）的控制，并且确定由多个激励信号产生的控制命令。
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公开(公告)号：US20100156198A1
公开(公告)日：2010-06-24
申请号：US12643888
申请日：2009-12-21
申请人： Alexander Cooper , Scott Coakley , Douglas C. Watson , Alton H. Phillips , Gaurav Keswani , Michael B. Binnard
发明人： Alexander Cooper , Scott Coakley , Douglas C. Watson , Alton H. Phillips , Gaurav Keswani , Michael B. Binnard
CPC分类号： G03F7/70858 , G03F7/70758 , H02K9/19 , H02K9/20 , H02K41/031 , H02K2201/18
摘要： According to one aspect of the present invention, a motor arrangement includes at least one coil, a cover plate, and a shield layer. The at least one coil has a first side and a second side. The cover plate is positioned substantially over the first side of the at least one coil at a distance from the at least one coil. The shield layer is positioned between the first side of the at least one coil and the cover plate, and has a top surface. The top surface contacts the cover plate, and includes a liquid and a gas that form a mixture and cause the top surface to have a substantially constant temperature.
摘要翻译： 根据本发明的一个方面，电动机装置包括至少一个线圈，盖板和屏蔽层。 该至少一个线圈具有第一侧和第二侧。 覆盖板基本上位于距离至少一个线圈一定距离的至少一个线圈的第一侧上方。 屏蔽层位于至少一个线圈的第一侧和盖板之间，并具有顶面。 顶表面接触盖板，并且包括形成混合物的液体和气体，并使顶表面具有基本恒定的温度。
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公开(公告)号：US20080165451A1
公开(公告)日：2008-07-10
申请号：US12050675
申请日：2008-03-18
IPC分类号： G11B5/55
CPC分类号： H02K41/0356 , H02K2201/18
摘要： Methods and apparatus for increasing the efficiency of a voice coil motor (VCM) are disclosed. According to one aspect of the present invention, a cylindrical and radially symmetric VCM includes a plurality of sets of magnets, and a single coil. The plurality of sets of the magnets are each arranged in an array configuration, and cooperate to form a magnetic field. The coil receives current and has a plurality of windings. A first space is defined within the coil, and the plurality of sets of the magnets are arranged such that a first set of the magnets is positioned within the first space and a second set of the magnets is positioned external to the coil.
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公开(公告)号：US07368838B2
公开(公告)日：2008-05-06
申请号：US10908178
申请日：2005-04-29
IPC分类号： H02K33/00
CPC分类号： H02K41/0356 , H02K2201/18
摘要： Methods and apparatus for increasing the efficiency of a voice coil motor (VCM) are disclosed. According to one aspect of the present invention, a cylindrical and radially symmetric VCM includes a plurality of sets of magnets, and a single coil. The plurality of sets of the magnets are each arranged in an array configuration, and cooperate to form a magnetic field. The coil receives current and has a plurality of windings. A first space is defined within the coil, and the plurality of sets of the magnets are arranged such that a first set of the magnets is positioned within the first space and a second set of the magnets is positioned external to the coil.
摘要翻译： 公开了提高音圈电机（VCM）效率的方法和装置。 根据本发明的一个方面，圆柱形和径向对称的VCM包括多组磁体和单个线圈。 多组磁体各配置成阵列构造，并配合形成磁场。 线圈接收电流并具有多个绕组。 第一空间被限定在线圈内，并且多组磁体被布置成使得第一组磁体位于第一空间内，而第二组磁体位于线圈的外部。
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5.发明授权Methods for limiting counter-mass trim-motor force and stage assemblies incorporating same 有权限制反质量调节马达力的方法和包含相同质量的马达的阶段组件公开(公告)号：US09529353B2
公开(公告)日：2016-12-27
申请号：US13228341
申请日：2011-09-08
IPC分类号： G03B27/58 , G03B27/62 , G05B19/404 , G03F7/20
CPC分类号： G05B19/404 , G03F7/70725 , G03F7/70766
摘要： An exemplary stage assembly has movable stage mass and counter-mass. A stage motor is coupled to the stage mass and counter-mass such that stage-mass motion imparted by the stage motor causes a reactive motion of the counter-mass counter to the motion of the stage mass. At least one trim-motor is coupled to the counter-mass. A control system commands the trim-motor to regulate movement of the counter-mass in reaction to stage-mass motion. A PI feedback controller receives the following-error of the counter-mass and generates corresponding center-of-gravity (CG) force commands and trim-motor force commands to the trim-motor(s) to produce corrective counter-mass motion. A trim-motor force limiter receives trim-motor force commands and produces corresponding limited trim-motor force commands that are fed back as actual CG force commands to the feedback controller to modify integral terms of the feedback controller according to the limited trim-motor force commands.
摘要翻译： 示例性的舞台组件具有可移动的舞台质量和反质量。 舞台电机被耦合到舞台质量和反质量，使得由舞台电动机施加的舞台质量运动导致反质量计数器对舞台质量的运动的反作用运动。 至少一个调整电机与反质量联接。 控制系统命令微调电机调节反质量运动反应阶段质量运动。 PI反馈控制器接收反质量的跟随误差，并产生相应的重心（CG）力指令和微调电机力指令给微调电机，以产生校正反质量运动。 修剪马达力限制器接收修剪马达力指令并产生相应的有限的修剪马达力命令，作为实际的CG力命令反馈到反馈控制器，以根据限制的修正马达力修改反馈控制器的积分项 命令。
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6.发明授权公开(公告)号：US08853988B2
公开(公告)日：2014-10-07
申请号：US12406322
申请日：2009-03-18
IPC分类号： G05B1/06 , G05B19/404 , G03F7/20
CPC分类号： G05B19/404 , G03F7/70725 , G03F7/70758 , G05B2219/41128 , G05B2219/41443
摘要： Embodiments of the invention compensate for one or more effects of a stage motor in a precision stage device. A feedforward module receives an input signal corresponding to the effect of the motor and generates a feedforward control signal that can be used to modify a motor control signal to compensate for the effect of the motor. In some embodiments, a control system is provided to compensate for a back-electromotive force generated by a motor, while in other embodiments, a control system may compensate for an inductive effect of a motor. Embodiments of the invention may be useful in precision stage devices, for example, lithography devices such as steppers and scanners.
摘要翻译： 本发明的实施例补偿了精密级装置中的级电动机的一个或多个效果。 前馈模块接收与电动机的效果相对应的输入信号，并产生可用于修改电动机控制信号以补偿电动机的影响的前馈控制信号。 在一些实施例中，提供控制系统以补偿由电动机产生的反电动势，而在其他实施例中，控制系统可以补偿电动机的感应效应。 本发明的实施例可用于精密平台装置，例如平版印刷装置，例如步进器和扫描器。
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7.发明授权High NA catadioptric imaging optics for imaging A reticle to a pair of imaging locations 有权高NA反射折射成像光学器件用于将掩模版成像到一对成像位置公开(公告)号：US08705170B2
公开(公告)日：2014-04-22
申请号：US12547086
申请日：2009-08-25
IPC分类号： G02B17/08
CPC分类号： G02B17/0892 , G02B27/1066 , G02B27/143 , G03F7/70225 , G03F7/7025 , G03F7/70275 , G03F7/70833
摘要： New and useful concepts for an imaging optical system configured to simultaneously image a reticle to a pair of imaging locations are provided, where the imaging optics comprise a pair of arms, each of which includes catadioptric imaging optics. In addition, the imaging optics are preferably designed to image a reticle simultaneously to the pair of imaging locations, at a numerical aperture of at least 1.3, and without obscuration of light by the imaging optics.
摘要翻译： 提供了一种被配置为将掩模版同时成像到一对成像位置的成像光学系统的新的和有用的概念，其中成像光学器件包括一对臂，每个臂包括反射折射成像光学元件。 此外，成像光学器件优选地设计成在至少为1.3的数值孔径同时成像成对位置的成对位置成像，并且不会由成像光学元件遮挡光。
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公开(公告)号：US08432072B2
公开(公告)日：2013-04-30
申请号：US12424878
申请日：2009-04-16
申请人： Scott Coakley , Michael B. Binnard
发明人： Scott Coakley , Michael B. Binnard
CPC分类号： H02K41/02 , G03B27/58 , G03F7/70758 , H02K41/03 , H02K2201/18
摘要： A mover (344) moving a stage (238) along a first axis, along a second axis and along a third axis includes a magnetic component (354), a conductor component (356), and a control system (324). The magnetic component (354) includes a plurality of magnets (354D) that are surrounded by a magnetic field. The conductor component (356) is positioned near the magnetic component (354) in the magnetic field. Further, the conductor component (356) interacts with the magnetic component (354) when current is directed to the conductor component (356) to generate a controllable force along the first axis, a controllable force along the second axis, and a controllable force along the third axis. The conductor component (356) can include a split coil design, having a first conductor array (356A) and a second conductor array (356B) that is positioned substantially adjacent to the first conductor array (356A). The conductor component (356) and the magnetic component (354) can be displaced relative to each other along the third axis. The control system (324) independently directs current to each of the conductor arrays (356A, 356B) to generate a controllable force along the first axis, along the second axis, and along the third axis. With this design, the same mover can be used to move the stage along three degrees of freedom (“DOF”).
摘要翻译： 移动台（344）沿着第一轴线沿第二轴线和第三轴线移动台架（238）包括磁性部件（354），导体部件（356）和控制系统（324）。 磁性部件（354）包括由磁场包围的多个磁体（354D）。 导体部件（356）位于磁场附近的磁性部件（354）附近。 此外，当电流被引导到导体部件356时，导体部件356与磁性部件354相互作用，沿着第一轴线产生可控制的力，沿着第二轴线产生可控制的力， 第三轴。 导体部件（356）可以包括具有第一导体阵列（356A）和基本上邻近于第一导体阵列（356A）定位的第二导体阵列（356B）的分裂线圈设计。 导体部件（356）和磁性部件（354）可以相对于彼此沿第三轴线移位。 控制系统（324）独立地将电流引导到每个导体阵列（356A，356B），以沿着第一轴线，沿第二轴线以及第三轴线产生可控制的力。 通过这种设计，可以使用相同的推动器沿着三个自由度（“DOF”）移动舞台。
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公开(公告)号：US20120325027A1
公开(公告)日：2012-12-27
申请号：US13526322
申请日：2012-06-18
IPC分类号： G01D21/00
CPC分类号： G03F7/70716 , G03F7/70766 , G03F7/709 , G03F7/70991
摘要： In one embodiment, a stage apparatus includes a wafer stage, at least one conduit, and a measurement stage. The at least one conduit is coupled between the wafer stage and a ground. The measurement stage is configured to approximately follow the wafer stage during at least a portion of a motion of the wafer stage, and is configured to carry the at least one conduit to reduce disturbances on the wafer stage caused by the at least one conduit.
摘要翻译： 在一个实施例中，舞台装置包括晶片台，至少一个导管和测量台。 至少一个导管连接在晶片台和地之间。 测量级被配置为在晶片台的运动的至少一部分期间大致跟随晶片台，并且被配置为承载至少一个管道以减少由至少一个导管引起的晶片台上的干扰。
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公开(公告)号：US20080252151A1
公开(公告)日：2008-10-16
申请号：US12061428
申请日：2008-04-02
申请人： Michael B. Binnard , Masahiro Totsu
发明人： Michael B. Binnard , Masahiro Totsu
IPC分类号： H02K41/00
CPC分类号： H02K41/03 , G03F7/70758 , H02K2201/18
摘要： A mover (344) that moves a stage (238) along a first axis and along a second axis includes a magnetic component (354), a conductor component (356), and a control system (324). The magnetic component (354) includes one or more magnets (354D) that are surrounded by a magnetic field. The conductor component (356) is positioned near the magnetic component (354). Further, the conductor component (356) interacts with the magnetic component (354) when current is directed to the conductor component (356). The control system (224) directs current to the conductor component (356) to generate a controllable force along the first axis and a controllable force along the second axis. With this design, the same mover (344) can be used to move the stage (238) along two degrees of freedom (“DOF”). Further, the conductor component (356) including a first phase coil (364A) and a second phase coil (364B) that partly overlaps the first phase coil (364A). With this design, the size and efficiency of the mover (334) is significantly improved. As a result thereof, the overall footprint of the mover (344) can be reduced and the heat generated by the mover (344) is minimized.
摘要翻译： 沿着第一轴线和第二轴线移动台架（238）的移动器（344）包括磁性部件（354），导体部件（356）和控制系统（324）。 磁性部件（354）包括由磁场包围的一个或多个磁体（354D）。 导体部件（356）位于磁性部件（354）附近。 此外，当电流被引导到导体部件（356）时，导体部件（356）与磁性部件（354）相互作用。 控制系统（224）将电流引导到导体部件（356）以沿着第一轴线产生可控制的力并且沿着第二轴线产生可控制的力。 通过这种设计，可以使用相同的移动器（344）沿两个自由度（“DOF”）移动平台（238）。 此外，导体部件（356）包括与第一相线圈（364A）部分重叠的第一相线圈（364A）和第二相线圈（364B）。 通过这种设计，移动器（334）的尺寸和效率得到显着提高。 作为其结果，可以减小动子（344）的总体占地面积，并且由动子（344）产生的热量最小化。
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