发明申请
US20080105937A1 Method for processing a MEMS/CMOS cantilever based memory storage device
有权
用于处理基于MEMS / CMOS悬臂的存储器件的方法
- 专利标题： Method for processing a MEMS/CMOS cantilever based memory storage device
- 专利标题（中）： 用于处理基于MEMS / CMOS悬臂的存储器件的方法
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申请号： US12005894申请日： 2007-12-28
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公开(公告)号： US20080105937A1公开(公告)日： 2008-05-08
- 发明人: Eyal Bar-Sadeh , Tsung-Kuan Chou , Valluri Rao , Krishnamurthy Murali
- 申请人： Eyal Bar-Sadeh , Tsung-Kuan Chou , Valluri Rao , Krishnamurthy Murali
- 主分类号： H01L29/84
- IPC分类号： H01L29/84
摘要：
A Seek and Scan Probe (SSP) memory device is disclosed. The memory device includes a moving part having microelectromechanical (MEMS) structures fabricated on a first wafer and CMOS and memory medium components fabricating on a second wafer bonded to the first wafer.
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