Composite beam microelectromechanical system switch
    1.
    发明申请
    Composite beam microelectromechanical system switch 审中-公开
    复合梁微机电系统开关

    公开(公告)号:US20050248424A1

    公开(公告)日:2005-11-10

    申请号:US10841385

    申请日:2004-05-07

    IPC分类号: B81B3/00 H01H1/00 H01H51/22

    摘要: A cantilevered beam radio frequency microelectro-mechanical switch may be formed of low stress gradient polysilicon with a metallic contact. The region between the beam and the substrate may be free of dielectric in some embodiments. Oxide layers may be protected by a nitride protection layer in some cases.

    摘要翻译: 悬臂梁射频微电子机械开关可以由具有金属接触的低应力梯度多晶硅形成。 在一些实施例中,光束和衬底之间的区域可以不具有电介质。 在某些情况下,氧化物层可以被氮化物保护层保护。

    DOUBLE-ELECTRODE CANTILEVER ACTUATION FOR SEEK-SCAN-PROBE DATA ACCESS
    2.
    发明申请
    DOUBLE-ELECTRODE CANTILEVER ACTUATION FOR SEEK-SCAN-PROBE DATA ACCESS 有权
    用于SEEK-SCAN-PROBE数据访问的双电极CANTILEVER执行

    公开(公告)号:US20100296382A1

    公开(公告)日:2010-11-25

    申请号:US12847847

    申请日:2010-07-30

    IPC分类号: G11B9/00

    摘要: A seek-scan-probe memory device, utilizing a media electrode to allow active cantilevers to contact the storage media, and a pull electrode to pull up cantilevers away from the storage media when in an inactive mode. Other embodiments are described and claimed.

    摘要翻译: 寻找扫描探针存储装置,利用介质电极来允许主动悬臂与存储介质接触;以及拉电极,当处于非活动模式时,将悬臂从存储介质上拉出。 描述和要求保护其他实施例。

    Mechanism to prevent actuation charging in microelectromechanical actuators
    4.
    发明申请
    Mechanism to prevent actuation charging in microelectromechanical actuators 有权
    防止微机电致动器致动充电的机构

    公开(公告)号:US20060065942A1

    公开(公告)日:2006-03-30

    申请号:US10955153

    申请日:2004-09-30

    IPC分类号: H01L29/84

    CPC分类号: H01H59/0009 H01H2059/0018

    摘要: According to one embodiment a microelectromechanical (MEMS) switch is disclosed. The MEMS switch includes a top movable electrode, and an actutaion electrode with an undoped polysilicon stopper region to contact the top movable electrode when an actuation current is applied. The undoped polysilicon stopper region prevents actuation charging that accumulates over time in a unipolar actuation condition.

    摘要翻译: 根据一个实施例,公开了一种微机电(MEMS)开关。 MEMS开关包括顶部可动电极和具有未掺杂多晶硅停留区域的活性电极,以在施加致动电流时接触顶部可动电极。 未掺杂的多晶硅停止区域防止在单极致动条件下随时间累积的致动充电。

    Double-electrode cantilever actuation for seek-scan-probe data access
    8.
    发明授权
    Double-electrode cantilever actuation for seek-scan-probe data access 有权
    用于寻道扫描探头数据访问的双电极悬臂驱动

    公开(公告)号:US08000216B2

    公开(公告)日:2011-08-16

    申请号:US12847847

    申请日:2010-07-30

    IPC分类号: G11B9/00

    摘要: A seek-scan-probe memory device, utilizing a media electrode to allow active cantilevers to contact the storage media, and a pull electrode to pull up cantilevers away from the storage media when in an inactive mode. Other embodiments are described and claimed.

    摘要翻译: 寻找扫描探针存储装置,利用介质电极来允许主动悬臂与存储介质接触;以及拉电极,当处于非活动模式时,将悬臂从存储介质上拉出。 描述和要求保护其他实施例。

    Ultra-low voltage capable zipper switch
    9.
    发明申请
    Ultra-low voltage capable zipper switch 失效
    超低电压拉链开关

    公开(公告)号:US20060290443A1

    公开(公告)日:2006-12-28

    申请号:US11165795

    申请日:2005-06-23

    IPC分类号: H01P1/10

    摘要: An electromechanical switch includes an actuation electrode, an anchor, a cantilever electrode, a contact, and signal lines. The actuation electrode and anchor are mounted to a substrate. The cantilever electrode is supported by the anchor above the actuation electrode. The contact is mounted to the cantilever electrode. The signal lines are positioned to form a closed circuit with the contact when an actuation voltage is applied between the actuation electrode and the cantilever electrode causing the cantilever electrode to bend towards the actuation electrode in a zipper like movement starting from a distal end of the cantilever electrode.

    摘要翻译: 机电开关包括致动电极,锚,悬臂电极,触点和信号线。 致动电极和锚固件安装到基板上。 悬臂电极由致动电极上方的锚固件支撑。 触点安装到悬臂电极。 当在致动电极和悬臂电极之间施加致动电压时,信号线被定位成与触点形成闭合电路,导致悬臂电极以拉链的方式朝着致动电极弯曲,从悬臂的远端开始 电极。

    Collapsible contact switch
    10.
    发明申请
    Collapsible contact switch 有权
    可折叠接触开关

    公开(公告)号:US20050219016A1

    公开(公告)日:2005-10-06

    申请号:US10812900

    申请日:2004-03-31

    IPC分类号: H01H1/18 H01H59/00 H01H51/22

    摘要: Embodiments of the invention describe a contact switch, which may include a bottom electrode structure including a bottom actuation electrode and a top electrode structure including a top actuation electrode and one or more stoppers able to maintain a predetermined gap between the top electrode and the bottom electrode when the switch is in a collapsed state.

    摘要翻译: 本发明的实施例描述了接触开关,其可以包括底部电极结构,其包括底部致动电极和顶部电极结构,顶部电极结构包括顶部致动电极和能够在顶部电极和底部电极之间保持预定间隙的一个或多个塞子 当开关处于折叠状态时。