发明申请
US20080107507A1 Reduced capacity carrier, transport, load port, buffer system
审中-公开
减少承载能力，运输负载端口，缓冲系统
- 专利标题： Reduced capacity carrier, transport, load port, buffer system
- 专利标题（中）： 减少承载能力，运输负载端口，缓冲系统
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申请号： US11787981申请日： 2007-04-18
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公开(公告)号： US20080107507A1公开(公告)日： 2008-05-08
- 发明人: Michael L. Bufano , Ulysses Gilchrist , William Fosnight , Chrstopher Hofmeister , Daniel Babbs , Robert C. May
- 申请人： Michael L. Bufano , Ulysses Gilchrist , William Fosnight , Chrstopher Hofmeister , Daniel Babbs , Robert C. May
- 主分类号： H01L21/677
- IPC分类号： H01L21/677
摘要：
A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.
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