发明申请
- 专利标题: INTERCONNECT STRUCTURE WITH A BARRIER-REDUNDANCY FEATURE
- 专利标题(中): 具有障碍 - 冗余特征的互连结构
-
申请号: US11925161申请日: 2007-10-26
-
公开(公告)号: US20080108220A1公开(公告)日: 2008-05-08
- 发明人: Chih-Chao Yang , Louis Hsu
- 申请人: Chih-Chao Yang , Louis Hsu
- 申请人地址: US NY Armonk 10504
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk 10504
- 主分类号: H01L21/4763
- IPC分类号: H01L21/4763
摘要:
An interconnect structure that includes a barrier-redundancy feature which is capable of avoiding a sudden open circuit after an electromigration (EM) failure as well as a method of forming the same are provided. In accordance with the present invention, the barrier-redundancy feature is located within preselected locations within the interconnect structure including in a wide line region, a thin line region or any combination thereof. The barrier-redundancy feature includes an electrical conductive material located between, and in contact with, a conductive line diffusion barrier of a conductive line and a via diffusion barrier of an overlying via. The presence of the inventive barrier-redundancy feature creates an electrical path between the via diffusion barrier along the sidewalls of the via and the conductive line diffusion barrier along the sidewalls of the conductive line. This electrical path generated by the inventive barrier-redundancy feature can avoid a sudden open circuit resulting from EM failure at the bottom of the via. The presence of the inventive barrier-redundancy feature within an interconnect structure provides sufficient time for chip replacement or system operation.
公开/授权文献
- US07605072B2 Interconnect structure with a barrier-redundancy feature 公开/授权日:2009-10-20
信息查询
IPC分类: