发明申请
- 专利标题: PIEZOELECTRIC/ELECTROSTRICTIVE FILM ELEMENT
- 专利标题(中): 压电/电镀膜元件
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申请号: US11960923申请日: 2007-12-20
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公开(公告)号: US20080111453A1公开(公告)日: 2008-05-15
- 发明人: Kunihiko YOSHIOKA , Takao Ohnishi , Tomohiro Yamada
- 申请人: Kunihiko YOSHIOKA , Takao Ohnishi , Tomohiro Yamada
- 申请人地址: JP Nagoya-City
- 专利权人: NGK Insulators, Ltd.
- 当前专利权人: NGK Insulators, Ltd.
- 当前专利权人地址: JP Nagoya-City
- 优先权: JP2005-189326 20050629; JP2005-330589 20051115
- 主分类号: H01L41/00
- IPC分类号: H01L41/00
摘要:
A lower electrode 4 and an auxiliary electrode 8, a piezoelectric/electrostrictive film 5, and an upper electrode 6 are sequentially arranged in layers on a substrate 1. The lower electrode 4 is continuously formed in a region ranging from a first portion of the thick-walled portion 2 to a thin-walled diaphragm portion 3. The auxiliary electrode 8 is continuously formed in a region ranging from a second portion of the thick-walled portion 2 opposite the first portion to a position on the thin-walled diaphragm portion 3, the position being separated from the lower electrode 4. The upper electrode 6 is formed in such a manner as to overlie the piezoelectric/electrostrictive film 5 and the auxiliary electrode 8. Furthermore, a connection electrode 20 is provided for electrically connecting the upper electrode 6 and the auxiliary electrode 8. Thus, a plurality of paths are provided for electrically connecting the upper electrode 6 and the auxiliary electrode 8. Therefore, even when connection through a certain path is cut off due to fracture of a portion of the upper electrode 6 caused by deterioration in insulating performance of the piezoelectric/electrostrictive film 5, electrical connection between the upper electrode 6 and the auxiliary electrode 8 can be maintained through the remaining path(s).
公开/授权文献
- US07427820B2 Piezoelectric/electrostrictive film element 公开/授权日:2008-09-23