发明申请
- 专利标题: DUAL-PLANE COMPLEMENTARY METAL OXIDE SEMICONDUCTOR
- 专利标题(中): 双平面补充金属氧化物半导体
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申请号: US12014850申请日: 2008-01-16
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公开(公告)号: US20080113476A1公开(公告)日: 2008-05-15
- 发明人: Brent Anderson , Edward Nowak
- 申请人: Brent Anderson , Edward Nowak
- 申请人地址: US NY Armonk 10504
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk 10504
- 主分类号: H01L21/8238
- IPC分类号: H01L21/8238
摘要:
Embodiments herein present a device, method, etc. for a dual-plane complementary metal oxide semiconductor. The device comprises a fin-type transistor on a bulk silicon substrate. The fin-type transistor comprises outer fin regions and a center semiconductor fin region, wherein the center fin region has a {110} crystalline oriented channel surface. The outer fin regions comprise a strain inducing impurity that stresses the center semiconductor fin region. The strain inducing impurity contacts the bulk silicon substrate, wherein the strain inducing impurity comprises germanium and/or carbon. Further, the fin-type transistor comprises a thick oxide member on a top face thereof. The fin-type transistor also comprises a first transistor on a first crystalline oriented surface, wherein the device further comprises a second transistor on a second crystalline oriented surface that differs from the first crystalline oriented surface.
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