发明申请
US20080131257A1 SYSTEM AND METHOD FOR REDUCING COLLATERAL TRANSPORT-INDUCED DAMAGE DURING MICROSTRUCTURE PROCESSING
审中-公开
在微结构加工过程中减少碰撞运输诱导损伤的系统和方法
- 专利标题： SYSTEM AND METHOD FOR REDUCING COLLATERAL TRANSPORT-INDUCED DAMAGE DURING MICROSTRUCTURE PROCESSING
- 专利标题（中）： 在微结构加工过程中减少碰撞运输诱导损伤的系统和方法
-
申请号： US11756124申请日： 2007-05-31
-
公开(公告)号： US20080131257A1公开(公告)日： 2008-06-05
- 发明人: Carsten Peters , Thomas Werner , Frank Feustel , Kai Frohberg
- 申请人： Carsten Peters , Thomas Werner , Frank Feustel , Kai Frohberg
- 优先权： DE102006056621.1 20061130
- 主分类号： B65H1/00
- IPC分类号： B65H1/00 ; B05D5/10 ; G06F19/00 ; B65B33/00
摘要：
By providing a safety material, such as an adhesive foil, the probability for transport-related damage or destruction of substrates caused by broken substrates may be significantly reduced.
信息查询
