发明申请
US20080132049A1 METHOD FOR FABRICATING SCHOTTKY BARRIER TUNNEL TRANSISTOR 失效
用于制作肖特基栅栏隧道晶体管的方法

METHOD FOR FABRICATING SCHOTTKY BARRIER TUNNEL TRANSISTOR
摘要:
Provided is a method for fabricating a Schottky barrier tunnel transistor (SBTT) that can fundamentally prevent the generation of a gate leakage current caused by damage of spacers formed on both sidewalls of a gate electrode. The method for fabricating a Schottky barrier tunnel transistor, which includes: a) forming a silicon pattern and a sacrificial pattern on a buried oxide layer supported by a support substrate; b) forming a source/drain region on the buried oxide layer exposed on both sides of the silicon pattern, the source/drain region being formed of a metal layer and being in contact with both sidewalls of the silicon pattern; c) removing the sacrificial pattern to expose the top surface of the silicon pattern; and d) forming a gate insulating layer and a gate electrode on the exposed silicon pattern.
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