发明申请
- 专利标题： Micromechanical Component Having Multiple Caverns, and Manufacturing Method
- 专利标题（中）： 具有多个洞穴的微机械部件和制造方法
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申请号： US11628100申请日： 2005-04-28
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公开(公告)号： US20080136000A1公开(公告)日： 2008-06-12
- 发明人: Frank Fischer , Eckhard Graf , Heiko Stahl , Hartmut Kueppers , Roland Scheuerer
- 申请人： Frank Fischer , Eckhard Graf , Heiko Stahl , Hartmut Kueppers , Roland Scheuerer
- 优先权： DE102004027501.7 20040604
- 国际申请： PCT/EP2005/051917 WO 20050428
- 主分类号： H01L23/055
- IPC分类号： H01L23/055 ; H01L21/58
摘要：
A micromechanical component having at least two caverns is provided, the caverns being delimited by the micromechanical component and a cap, and the caverns having different internal atmospheric pressures. The micromechanical component and cap are hermetically joined to one another at a first specifiable atmospheric pressure, then an access to at least one cavern is produced, and subsequently the access is hermetically closed off at a second specifiable atmospheric pressure.