发明申请
- 专利标题: Apparatus and method for exposing substrate
- 专利标题(中): 用于曝光衬底的装置和方法
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申请号: US11999526申请日: 2007-12-06
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公开(公告)号: US20080137046A1公开(公告)日: 2008-06-12
- 发明人: Ju-A Ryu , Chang-Su Lim , Yo-Han Ahn , Hyung-Seok Choi , Kyung-Log Moon
- 申请人: Ju-A Ryu , Chang-Su Lim , Yo-Han Ahn , Hyung-Seok Choi , Kyung-Log Moon
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 优先权: KR10-2006-0126452 20061212
- 主分类号: G03B27/42
- IPC分类号: G03B27/42 ; G03B27/52
摘要:
A substrate exposing apparatus includes an immersion exposure unit, disposed between a projection optical system and a substrate, including a vessel disposed on an optical path and filled with a liquid, a supply line connected to one side of the vessel to supply the liquid to the vessel, a first drain line connected to the other side of the vessel to drain the liquid from the vessel, and a monitoring unit including at least one first measuring unit connected to the first drain line to detect a property of the liquid flowing through the first drain line. The monitoring unit can include a collection line connected to the first drain line to collect the liquid, a first bath storing the collected liquid, and a first distribution line through which the liquid in the first bath can flow. The first measuring unit is installed on the first distribution line.
公开/授权文献
- US1883215A Low viscosity nitrocellulose and process of making the same 公开/授权日:1932-10-18