- 专利标题: Chip structure and process for forming the same
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申请号: US12025000申请日: 2008-02-02
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公开(公告)号: US20080146019A1公开(公告)日: 2008-06-19
- 发明人: Mou-Shiung Lin , Jin-Yuan Lee , Ching-Cheng Huang
- 申请人: Mou-Shiung Lin , Jin-Yuan Lee , Ching-Cheng Huang
- 申请人地址: TW Hsinchu
- 专利权人: MEGICA CORPORATION
- 当前专利权人: MEGICA CORPORATION
- 当前专利权人地址: TW Hsinchu
- 优先权: TW90130876 20011213; TW90131030 20011214; TW90131796 20011221
- 主分类号: H01L21/4763
- IPC分类号: H01L21/4763
摘要:
A chip structure comprises a substrate, a first built-up layer, a passivation layer and a second built-up layer. The substrate includes many electric devices placed on a surface of the substrate. The first built-up layer is located on the substrate. The first built-up layer is provided with a first dielectric body and a first interconnection scheme, wherein the first interconnection scheme interlaces inside the first dielectric body and is electrically connected to the electric devices. The first interconnection scheme is constructed from first metal layers and plugs, wherein the neighboring first metal layers are electrically connected through the plugs. The passivation layer is disposed on the first built-up layer and is provided with openings exposing the first interconnection scheme. The second built-up layer is formed on the passivation layer. The second built-up layer is provided with a second dielectric body and a second interconnection scheme, wherein the second interconnection scheme interlaces inside the second dielectric body and is electrically connected to the first interconnection scheme. The second interconnection scheme is constructed from at least one second metal layer and at least one via metal filler, wherein the second metal layer is electrically connected to the via metal filler. The thickness, width, and cross-sectional area of the traces of the second metal layer are respectively larger than those of the first metal layers.
公开/授权文献
- US07482259B2 Chip structure and process for forming the same 公开/授权日:2009-01-27
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