Invention Application
US20080150007A1 VARIABLE SALICIDE BLOCK FOR RESISTANCE EQUALIZATION IN AN ARRAY
有权
用于在阵列中抵抗均匀化的可变的杀菌剂块
- Patent Title: VARIABLE SALICIDE BLOCK FOR RESISTANCE EQUALIZATION IN AN ARRAY
- Patent Title (中): 用于在阵列中抵抗均匀化的可变的杀菌剂块
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Application No.: US11748215Application Date: 2007-05-14
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Publication No.: US20080150007A1Publication Date: 2008-06-26
- Inventor: Michael Brennan , Yi He , Mark Randolph , Ming-Sang Kwan
- Applicant: Michael Brennan , Yi He , Mark Randolph , Ming-Sang Kwan
- Main IPC: H01L29/792
- IPC: H01L29/792 ; H01L21/8239

Abstract:
The present invention facilitates memory devices and operation of dual bit and single bit memory devices by providing systems and methods that employ a salicide block to vary and equalize the resistance of a memory array during fabrication. The present invention includes utilizing a common charge dissipation region to mitigate charge-loss by providing protection against charging up of the various lines as a result of further plasma etching processes. The salicide block equalizes the charge dissipation in the memory array by providing each wordline path with a varied amount of resistance in addition to the total path resistance. Because the charge protection provided to each wordline otherwise varies depending on the resistance path to a common discharge element, a salicide block for resistance equalization provides greater reliability and predictability during processing. Other such shapes conducive for any desired resistance path fall within the scope of the invention.
Public/Granted literature
- US07713875B2 Variable salicide block for resistance equalization in an array Public/Granted day:2010-05-11
Information query
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