发明申请
- 专利标题: DUAL BIT FLASH MEMORY DEVICES AND METHODS FOR FABRICATING THE SAME
- 专利标题(中): 双位闪存存储器件及其制造方法
-
申请号: US12054081申请日: 2008-03-24
-
公开(公告)号: US20080169502A1公开(公告)日: 2008-07-17
- 发明人: Amol Ramesh Joshi , Ning Cheng , Minghao Shen
- 申请人: Amol Ramesh Joshi , Ning Cheng , Minghao Shen
- 主分类号: H01L29/792
- IPC分类号: H01L29/792
摘要:
Methods for fabricating dual bit flash memory devices are provided. Method steps include forming a charge trapping layer overlying a substrate and fabricating two insulating members overlying the charge trapping layer. A polycrystalline silicon layer is provided overlying the charge trapping layer and about sidewalls of the insulating members. Sidewall spacers are formed overlying the polycrystalline silicon layer and about the sidewalls of the insulating members. A portion of the first polycrystalline silicon layer and a first portion of the charge trapping layer are removed. A first insulating layer is conformally deposited overlying the insulating members and the substrate. A gate spacer is formed between the two insulating members and overlying the first insulating layer. The two insulating members are removed and the charge trapping layer is etched to form charge storage nodes. Impurity dopants are implanted into the substrate to form impurity-doped bitline regions within the substrate.
公开/授权文献
信息查询
IPC分类: