发明申请
- 专利标题： Micromachined optical pressure sensor
- 专利标题（中）： 微加工光学压力传感器
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申请号： US12075922申请日： 2008-03-14
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公开(公告)号： US20080175529A1公开(公告)日： 2008-07-24
- 发明人: Anthony D. Kurtz , Boaz Kochman , Joseph VanDeWeert
- 申请人： Anthony D. Kurtz , Boaz Kochman , Joseph VanDeWeert
- 申请人地址： US NJ Leonia
- 专利权人： Kulite Semiconductor Products, Inc.
- 当前专利权人： Kulite Semiconductor Products, Inc.
- 当前专利权人地址： US NJ Leonia
- 主分类号： G02B6/02
- IPC分类号： G02B6/02 ; G02B6/00
摘要：
A pressure sensor including: a deflectable diaphragm including a substantially central boss and channel; and, an optical waveguide having first and second arms, wherein the first arm is substantially aligned with an edge of the boss and the second arm is substantially aligned with an edge of the channel.
公开/授权文献
- US07889955B2 Micromachined optical pressure sensor 公开/授权日：2011-02-15
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