发明申请
- 专利标题: Lithographic apparatus and device manufacturing method
- 专利标题(中): 光刻设备和器件制造方法
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申请号: US12000092申请日: 2007-12-07
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公开(公告)号: US20080186468A1公开(公告)日: 2008-08-07
- 发明人: Steven George Hansen , Heine Melle Mulder , Robert Kazinczi
- 申请人: Steven George Hansen , Heine Melle Mulder , Robert Kazinczi
- 申请人地址: NL Veldhoven
- 专利权人: ASML Netherlands B.V.
- 当前专利权人: ASML Netherlands B.V.
- 当前专利权人地址: NL Veldhoven
- 主分类号: G03B27/54
- IPC分类号: G03B27/54
摘要:
A method for configuring an illumination source of a lithographic apparatus is presented. The method includes dividing the illumination source into pixel groups, each pixel group including one or more illumination source points; selecting an illumination shape to expose a pattern, the illumination shape formed with at least one pixel group; iteratively calculating a lithographic metric as a result of a change of state of a pixel group in the illumination source, the change of the state of the pixel group creating a modified illumination shape; and adjusting the illumination shape based on the iterative results of calculations.
公开/授权文献
- US08576377B2 Lithographic apparatus and device manufacturing method 公开/授权日:2013-11-05
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