发明申请
- 专利标题： Micro Electromechanical Device For Tilting A Body In Two Degrees Of Freedom
- 专利标题（中）： 微机电设备，以两度自由倾斜身体
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申请号： US11814001申请日： 2006-01-10
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公开(公告)号： US20080186550A1公开(公告)日： 2008-08-07
- 发明人: Mark Theo Meuwese , Diederik Van Lierop , Ronald Jan Asjes , Gerardus L.M. Jansen , Eric Cornelis Egbertus Van Grunsven , Dannis Michel Brouwer
- 申请人： Mark Theo Meuwese , Diederik Van Lierop , Ronald Jan Asjes , Gerardus L.M. Jansen , Eric Cornelis Egbertus Van Grunsven , Dannis Michel Brouwer
- 申请人地址： NL EINDHOVEN
- 专利权人： KONINKLIJKE PHILIPS ELECTRONICS, N.V.
- 当前专利权人： KONINKLIJKE PHILIPS ELECTRONICS, N.V.
- 当前专利权人地址： NL EINDHOVEN
- 优先权： EP05100229.3 20050117
- 国际申请： PCT/IB2006/050089 WO 20060110
- 主分类号： G02B26/08
- IPC分类号： G02B26/08
摘要：
The invention relates to a micro electromechanical device (1′) for tilting a body (2) in two degrees of freedom comprising a carrier element (3) and a membrane (4), the body (2) being connected via the membrane (4) to the carrier element (3), wherein the body (2) and the carrier element (3) each comprise at least one electrode (5,6). The body (2) is tilted by means of electrostatic forces (7) between the at least one electrode (5) of the body (2) and the at least one electrode (6) of the carrier element (3) by an application of a voltage (V1,V2) to said electrodes (5,6) from a voltage source.
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