Invention Application
- Patent Title: Molybdenum Tubular Sputtering Targets with Uniform Grain Size and Texture
- Patent Title (中): 具有均匀粒度和纹理的钼管状溅射靶
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Application No.: US11574469Application Date: 2005-08-29
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Publication No.: US20080193798A1Publication Date: 2008-08-14
- Inventor: Brad Lemon , Joseph Hirt , Timothy Welling , James G. Daily , David Meendering , Gary Rozak , Jerome O'Grady , Peter R. Jepson , Prabhat Kumar , Steven A. Miller , Richard Wu , Davd G. Schwarz
- Applicant: Brad Lemon , Joseph Hirt , Timothy Welling , James G. Daily , David Meendering , Gary Rozak , Jerome O'Grady , Peter R. Jepson , Prabhat Kumar , Steven A. Miller , Richard Wu , Davd G. Schwarz
- Applicant Address: US MA Newton
- Assignee: H. C. STARCK INC.
- Current Assignee: H. C. STARCK INC.
- Current Assignee Address: US MA Newton
- International Application: PCT/US05/30852 WO 20050829
- Main IPC: C23C14/34
- IPC: C23C14/34 ; B22F3/14 ; C22C27/04

Abstract:
Molybdenum sputtering targets and sintering characterized as having no or minimal texture banding or through thickness gradient. The molybdenum sputtering targets having a fine, uniform grain size as well as uniform texture, are high purity and can be micro-alloyed to improved performance. The sputtering targets can be round discs, square, rectangular or tubular and can be sputtered to form thin films on substrates. By using a segment-forming method, the size of the sputtering target can be up to 6 m×5.5 m. The thin films can be used in electronic components such as Thin Film Transistor—Liquid Crystal Displays, Plasma Display Panels, Organic Light Emitting Diodes, Inorganic Light Emitting Diode Displays, Field Emitting Displays, solar cells, sensors, semiconductor devices, and gate device for CMOS (complementary metal oxide semiconductor) with tunable work functions.
Public/Granted literature
- US08088232B2 Molybdenum tubular sputtering targets with uniform grain size and texture Public/Granted day:2012-01-03
Information query
IPC分类: