发明申请
US20080210368A1 Method and Device for Transferring a Chip to a Contact Substrate
有权
将芯片转移到接触基板的方法和装置
- 专利标题: Method and Device for Transferring a Chip to a Contact Substrate
- 专利标题(中): 将芯片转移到接触基板的方法和装置
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申请号: US11910771申请日: 2006-04-10
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公开(公告)号: US20080210368A1公开(公告)日: 2008-09-04
- 发明人: Elke Zakel , Ghassem Azdasht
- 申请人: Elke Zakel , Ghassem Azdasht
- 优先权: DE102005016521.4 20050408
- 国际申请: PCT/DE2006/000628 WO 20060410
- 主分类号: B44C1/00
- IPC分类号: B44C1/00 ; B29C65/78
摘要:
A method and device for transferring a chip (18) situated on a transfer substrate (26) to a contact substrate (50), and for contacting the chip with the contact substrate, in which the chip, the back side (19) of which is attached adhesively to a support surface of the transfer substrate facing the contact substrate, is charged with laser energy from behind through the transfer substrate, and the chip contacts (59, 60) thereof that are arranged opposite a contact surface (58) of the contact substrate are brought into contact with substrate contacts (56, 57) arranged on the contact surface by means of a pressing device (45, 46) from behind through the transfer substrate, and a thermal bond is created between the chip contacts and the substrate contacts.
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