发明申请
- 专利标题: Surface Micromechanical Process For Manufacturing Micromachined Capacitive Ultra-Acoustic Transducers and Relevant Micromachined Capacitive Ultra-Acoustic Transducer
- 专利标题(中): 用于制造微加工电容式超声波传感器的表面微机械工艺和相关微加工电容式超声换能器
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申请号: US11817621申请日: 2006-03-02
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公开(公告)号: US20080212407A1公开(公告)日: 2008-09-04
- 发明人: Giosue Caliano , Alessandro Caronti , Vittorio Foglietti , Elena Cianci , Antonio Minotti , Alessandro Nencioni , Massimo Pappalardo
- 申请人: Giosue Caliano , Alessandro Caronti , Vittorio Foglietti , Elena Cianci , Antonio Minotti , Alessandro Nencioni , Massimo Pappalardo
- 申请人地址: IT Rome IT Rome IT Rome IT Rome IT Pietramontecorvino - Foggia IT Rome IT Rome IT Milano
- 专利权人: Massimo PAPPALARDO,Giosuè CALIANO,Alessandro STUART SAVOIA,Alessandro CARONTI,Cristina LONGO,Philipp Gatta,CONSIGLIO NAZIONALE DELLE RICERCHE,ESAOTE S.P.A.
- 当前专利权人: Massimo PAPPALARDO,Giosuè CALIANO,Alessandro STUART SAVOIA,Alessandro CARONTI,Cristina LONGO,Philipp Gatta,CONSIGLIO NAZIONALE DELLE RICERCHE,ESAOTE S.P.A.
- 当前专利权人地址: IT Rome IT Rome IT Rome IT Rome IT Pietramontecorvino - Foggia IT Rome IT Rome IT Milano
- 优先权: ITRM2005A000093 20050304
- 国际申请: PCT/IT2006/000126 WO 20060302
- 主分类号: B06B1/00
- IPC分类号: B06B1/00 ; H04R31/00 ; B05D5/12
摘要:
The invention concerns a manufacturing process, and the related micromachined capacitive ultra-acoustic transducer, that uses commercial silicon wafer 8 already covered on at least one or, more preferably, on both faces by an upper layer 9 and by a lower layer 9′ of silicon nitride deposited with low pressure chemical vapour deposition technique, or deposition LPCVD deposition. One of the two layers 9 or 9′ of silicon nitride, of optimal quality, covering the wafer 8 is used as emitting membrane of the transducer. As a consequence, the micro-cell array 6 forming the CMUT transducer is grown onto one of the two layers of silicon nitride, i.e. it is grown at the back of the transducer with a sequence of steps that is reversed with respect to the classical technology.
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