发明申请
US20080213469A1 METHOD AND APPRATUS FOR HIGH DENSITY NANOSTRUCTURES 审中-公开
高密度纳米结构的方法与装置

  • 专利标题: METHOD AND APPRATUS FOR HIGH DENSITY NANOSTRUCTURES
  • 专利标题(中): 高密度纳米结构的方法与装置
  • 申请号: US11931273
    申请日: 2007-10-31
  • 公开(公告)号: US20080213469A1
    公开(公告)日: 2008-09-04
  • 发明人: Stephen Y. Chou
  • 申请人: Stephen Y. Chou
  • 主分类号: B05D5/12
  • IPC分类号: B05D5/12 B29C59/02 B44C1/22
METHOD AND APPRATUS FOR HIGH DENSITY NANOSTRUCTURES
摘要:
A method and apparatus for high density nanostructures is provided. The method and apparatus include Nano-compact optical disks, such as nano-compact disks (Nano-CDS). In one embodiment a 400 Gbit/in2 topographical bit density nano-CD with nearly three orders of magnitude higher than commercial CDS has been fabricated using nanoimprint lithography. The reading and wearing of such Nano-CDS have been studied using scanning proximal probe methods. Using a tapping mode, a Nano-CD was read 1000 times without any detectable degradation of the disk or the silicon probe tip. In accelerated wear tests with a contact mode, the damage threshold was found to be 19/N. This indicates that in a tapping mode, both the Nano-CD and silicon probe tip should have a lifetime that is at least four orders of magnitude longer than that at the damage threshold.
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